Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Seal Material

Viton

INDICATOR RCA216CZ090ZX

Product ID: RCA216CZ090ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
Normally Open

INDICATOR RCA217UZ091ZX

Product ID: RCA217UZ091ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Open

RCA222ZK2011 PRESSURE TRANSDUCER

Product ID: RCA222ZK2011
Unit of Measure
1/EA
Min Order Qty
1
Electrical Output
4-20 mA mA
Lower Indication Pressure (Metric)
0.8 bar
Maximum Pressure Range (Metric)
2 bar
Minimum Pressure Range (Metric)
0.5 bar
Seal Material
Viton
Upper Indication Point (Metric)
1.1 bar
See All Attributes

RCA222ZK4024 PRESSURE TRANSDUCER

Product ID: RCA222ZK4024
Unit of Measure
1/EA
Min Order Qty
1
Electrical Output
4-20 mA mA
Lower Indication Pressure (Metric)
1.8 bar
Maximum Pressure Range (Metric)
4 bar
Minimum Pressure Range (Metric)
1 bar
Seal Material
Viton
Upper Indication Point (Metric)
2.4 bar
See All Attributes

RCA222ZK8069 PRESSURE TRANSDUCER

Product ID: RCA222ZK8069
Unit of Measure
1/EA
Min Order Qty
1
Electrical Output
4-20 mA mA
Lower Indication Pressure (Metric)
4.8 bar
Maximum Pressure Range (Metric)
8 bar
Minimum Pressure Range (Metric)
2 bar
Seal Material
Viton
Upper Indication Point (Metric)
6.9 bar
See All Attributes

INDICATOR RCA217UZ091Z

Product ID: RCA217UZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Closed

INDICATOR RCA216CZ091Z

Product ID: RCA216CZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Closed

INDICATOR RCA217UZ090ZX

Product ID: RCA217UZ090ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
Normally Open

INDICATOR RCA218MZ084Z

Product ID: RCA218MZ084Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
1.1 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA218MZ097Z

Product ID: RCA218MZ097Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
6.9 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA218RZ084Z

Product ID: RCA218RZ084Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
1.1 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA218MZ091Z

Product ID: RCA218MZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
SPDT
20 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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