Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Sterilization Option(s)

Suitable for Gamma Irradiation, Suitable for Autoclave

Emflon® ll Membrane in Kleenpak™ Capsules

Emflon® II Membrane in Kleenpak™ Capsules serves the user's specific systematic needs. Pall offers options including gama-irradiatable, pre-sterilized and custom-made sets. All versions perform to the same top quality standard. Each unit is fully integrity testable and has the highly retentive Emflon II membrane. These capsule filters provide high air flows of both air and gas.

9 Products In Family

View Product »
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA2V002PV2G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
380 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA3V002PV6G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
1700 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA3V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
1700 cm²
See All Attributes
6 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English