Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches, Nitrile

Product ID: NXA12030UM18N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches

Product ID: NXA12030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 4 inches

Product ID: NXA1204U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA120UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 120-10U-M7E product photo

Nexis, NXA, 120 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXA12010UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
120 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA120U
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA12030UM7E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.25 inches

Product ID: NXA12925UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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NXA 1-20U-M8E product photo

Nexis, NXA, 1 μm, 50.8 cm (20 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), EPDM gasket

Product ID: NXA120UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA120UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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NXA 1-20U-M3E

Product ID: NXA120UM3E
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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