Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

5 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 inches

Product ID: NXA55U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 5 inches

Product ID: NXT1005U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 5 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT105UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 5 inches

Product ID: NXT1505U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches

Product ID: NXT15U
Unit of Measure
60/EA
Min Order Qty
60
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches

Product ID: NXT205U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches

Product ID: NXT505U
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 inches

Product ID: NXT55U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 5 inches

Product ID: NXA055UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
See All Attributes
NXA 0.5-5U product photo

Nexis, NXA, 0.5 μm, 12.7 cm (5 in), DOE industrial (no end caps)

Product ID: NXA055U
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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