Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXA1040UM8E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches, EPDM

Product ID: NXA104UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39 inches

Product ID: NXA1039UH21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA110U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 inches

Product ID: NXA10975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA110UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches

Product ID: NXA104U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXA110UM7E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 19.5 inches

Product ID: NXA1195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA110UM7S
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA12010U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA12010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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