Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT200TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
200 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
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CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

49834716

Product ID: 49834716TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

5EC4888389400J

Product ID: 5EC4888389400J
Unit of Measure
1/EA
Min Order Qty
1

5EC4888389200J

Product ID: 5EC4888389200J
Unit of Measure
1/EA
Min Order Qty
1

AB04P40018J

Product ID: AB04P40018JTIMMD
Unit of Measure
1/EA
Min Order Qty
1
Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3

AB04P00319J

Product ID: AB04P00319JTIMMD
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" Profile Star 1µm

Product ID: AB1A0107H4
Unit of Measure
6/EA
Min Order Qty
6

Filter 10" Profile Star 1µm

Product ID: AB1A0103J
Unit of Measure
6/EA
Min Order Qty
6

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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