Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P010RW30S
Unit of Measure
10/EA
Min Order Qty
10
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P010AW30S-EC1S-1PK

Product ID: P010AW30SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel

Product ID: P010RC30S395
Unit of Measure
10/EA
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10
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P020RW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
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DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches

Product ID: P025AW40A
Unit of Measure
10/EA
Min Order Qty
10
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5ESC10770-2U0045J-022

Product ID: P1122212
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-2U100ZJ-105

Product ID: P1122631
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-2U2-20ZJ-096

Product ID: P1122536
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U200ZJ-160

Product ID: P1122934
Unit of Measure
1/EA
Min Order Qty
1
P150A10U product photo

P150A10U

Product ID: P150A10U
Unit of Measure
30/EA
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30
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PMM,M020,316L 16X60

Product ID: P2019142
Unit of Measure
1/IN2
Min Order Qty
1

5ESC10770-3U6-40ZJ-022

Product ID: P2107759
Unit of Measure
1/EA
Min Order Qty
1
3,660 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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