Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

PROFILE ELEMENT

Product ID: HC3300FHD30M
Unit of Measure
1/EA
Min Order Qty
1

HC3300FPB10MY509

Product ID: HC3300FPB10MY509
Unit of Measure
3/EA
Min Order Qty
3

30" NYLON PROFILE II CARTRIDGE

Product ID: HC3300FHN30M
Unit of Measure
12/EA
Min Order Qty
24

CRTG HC3300FPN20E

Product ID: HC3300FPN20E
Unit of Measure
48/EA
Min Order Qty
48

Profile® II Filter Cartridge

Product ID: HC3300FPR20M
Unit of Measure
24/EA
Min Order Qty
24

HC3300FNN40M

Product ID: HC3300FNN40M
Unit of Measure
1/EA
Min Order Qty
1

CRTG HC3300FPT20M

Product ID: HC3300FPT20M
Unit of Measure
24/EA
Min Order Qty
24

CTRG PROFILE PIH RF 40" 400

Product ID: HC3300FPR40M
Unit of Measure
12/EA
Min Order Qty
12

Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN20Z
Unit of Measure
12/EA
Min Order Qty
12

Profile® II Filter Cartridge

Product ID: HC3310FGN13H
Unit of Measure
1/EA
Min Order Qty
1

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP20Z
Unit of Measure
12/EA
Min Order Qty
24

CRTG HC3300FPT40M

Product ID: HC3300FPT40M
Unit of Measure
24/EA
Min Order Qty
24

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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