Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

AB1Y0503J

Product ID: AB1Y0503JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB1Y1003J

Product ID: AB1Y1003JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB1Y0108J

Product ID: AB1Y0108JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P00319J

Product ID: AB2P00319JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile Code 19 20

Product ID: AB2P01019J
Unit of Measure
1/EA
Min Order Qty
1

AB2P00519J

Product ID: AB2P00519JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P01019J

Product ID: AB2P01019JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P10018J

Product ID: AB2P10018JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P30018H1

Product ID: AB2P30018H1TIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB2P40018H1

Product ID: AB2P40018H1TIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB2P70018JDUP

Product ID: AB2P70018JDUPTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB2W00325J

Product ID: AB2W00325J
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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