Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

AB1Y0503J

Product ID: AB1Y0503JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CRTG AB1Y0707PH

Product ID: AB1Y0707PH
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB1Y1003J

Product ID: AB1Y1003JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Filter 10" Profile II 10µm product photo

Filter 10" Profile II 10µm

Product ID: AB1Y1009J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB1Y2007H4

Product ID: AB1Y2007H4
Unit of Measure
12/EA
Min Order Qty
12

AB1Y3007H

Product ID: AB1Y3007H
Unit of Measure
12/EA
Min Order Qty
12

AB1Y0507H4

Product ID: AB1Y0507H4
Unit of Measure
12/EA
Min Order Qty
12

AB1Y0108J

Product ID: AB1Y0108JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P00319J

Product ID: AB2P00319JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile Code 19 20

Product ID: AB2P01019J
Unit of Measure
1/EA
Min Order Qty
1

AB2P00519J

Product ID: AB2P00519JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

filter

Product ID: AB2P00319J
Unit of Measure
24/EA
Min Order Qty
24

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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