Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Industrial Manufacturing

Product Type

Large Format Filters

Ultipleat® High Flow, Large Format Filters, Filter Grade 6 µm, Resinbondedglassfiber, Length 60 Inches, Fluoroelastomer O-ring Material

Product ID: HFU660GF060H
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 60 Inches, Polyester Support

Product ID: HFU660GF200H1
Unit of Measure
4/EA
Min Order Qty
4
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 60 Inches, Fluoroelastomer O-ring Material

Product ID: HFU660GF100H
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 60 Inches, Fluoroelastomer O-ring Material

Product ID: HFU660GF200H
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Plastic self-adjusting flange

Product ID: PEV12UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y400
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY045H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, No flange, Polypropylene Hardware

Product ID: XLDM102UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, EPDM, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: XLDM101UEPFCB
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, Nitrile

Product ID: XLDM102UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM152UEPFA
Unit of Measure
1/EA
Min Order Qty
1

Marksman™ High Flow, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Length 20 Inches

Product ID: XLDM1520UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
1.5 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
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651 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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