Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Industrial Manufacturing

Gasket / O-Ring Material

FEP encapsulated fluorocarbon elastomer (O-rings)

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA0510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA520UM7F
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT10010UM3F
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1002725UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches

Product ID: NXT101625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1502725UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches

Product ID: NXT1501625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, M18 - SOE flat closed end, external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, M18 - SOE flat closed end, external 222 O-ring

Product ID: NXT15010UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT2010UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT202725UM18F
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
End Configuration Code
M18
End Configuration
M18 - SOE flat closed end, external 222 O-ring
Cartridge Type
NXT
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches

Product ID: NXT251625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
25 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches

Product ID: NXT301625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
64 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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