Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Oil & Gas

10RPN20

Product ID: 10RPN20
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
7007251 product photo

SUPRAdisc SD II EK 200XEK0C440SP

Product ID: 7007251
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 50 200X050C440SP product photo

SUPRAdisc SD II 50 200X050C440SP

Product ID: 7007253
Unit of Measure
1/EA
Min Order Qty
1

SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1
SM Kö 3-5 abgepackt in Säcken a 25kg product photo

SM Kö 3-5 abgepackt in Säcken a 25kg

Product ID: 89582194
Unit of Measure
1/KG
Min Order Qty
1

AB1UY0207H4

Product ID: AB1UY0207H4
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Ethylene Propylene

Product ID: AB2A0507J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

Profile® Star Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, SiliconeElastomer

Product ID: AB2A2007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes
AB2RT7H4 product photo

AB2RT7H4

Product ID: AB2RT7H4
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridges, Polypropylene, Length 20 inches, Polypropylene Endcaps and Cage

Product ID: AB2Y0307H4
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® Star, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3A1007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

This product is currently not available. Please contact us for more information.

332 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English