Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Gasket / O-Ring Material

Silicone Elastomer

Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8

Product ID: PFT04560USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 3-29.25US 263 product photo

PFT 3-29.25US 263

Product ID: PFT32925US263
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Supor® Beverage Filter Cartridges, 40in, Silicone Elastomer

Product ID: AB4SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
Maximum Differential Pressure
5.5 bard (79.8 psid) (forward pressure)
See All Attributes

PREcart PP II Filter Cartridges, 2 µm, 30 in, Silicone Elastomer, 499A120W073SP

Product ID: B12437
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes

Pall Beer Final Filter AB4BB7WH32 with Bayonet Lock and Double 226 O-rings

Product ID: 5703810
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Cage, Core, Fin End and Endcap
Polypropylene
See All Attributes

MEMBRAcart XP Filter Cartridges, AB1MBX7WH4

Product ID: AB1MBX7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area (Metric m²)
0.6 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
See All Attributes

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 3, Silicone Elastomer O-ring

Product ID: AB1NB3WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes

Profile® UP Filter Cartridges, 10 in, 10µm, Silicone Elastomer

Product ID: AB1UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.2 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes
67 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English