UltiKleen™ Excellar Filter and KC Assemblies product photo Primary L

UltiKleen™ Excellar Filter and KC Assemblies

Pall’s UltiKleen Excellar filter is constructed of the most technologically advanced non-dewetting all-fluoro-polymer media that we offer to the semiconductor industry. This filter is specifically designed to handle the aqueous-based gas-generating chemicals vital for wafer cleaning (SC-1, SC-2, and SPM).

The non-dewetting property of the UltiKleen Excellar filter is achieved using our proprietary MST (Molecular Surface Tailoring) technology to tailor the surface chemistry on a molecular scale. This method is unlike conventional coating-and grafting-based methods that can compromise chemical compatibility and purity. The advantage of MST is that the PTFE membrane remains robust and durable in highly corrosive acids, bases, and organic compounds.
  • Non-dewetting PTFE membrane
  • Provides increased tool uptime
  • All fluoro-polymer construction
  • Provided completely prewet
  • High temperature and pressure capabilities
  • Very high flow rates
  • Low differential pressure
  • Manufactured in a cleanroom environment
  • 100% integrity tested


* Required
Need Help?
Download Datasheet
Description
Pall’s UltiKleen Excellar filter is constructed of the most technologically advanced non-dewetting all-fluoro-polymer media that we offer to the semiconductor industry. This filter is specifically designed to handle the aqueous-based gas-generating chemicals vital for wafer cleaning (SC-1, SC-2, and SPM).

The non-dewetting property of the UltiKleen Excellar filter is achieved using our proprietary MST (Molecular Surface Tailoring) technology to tailor the surface chemistry on a molecular scale. This method is unlike conventional coating-and grafting-based methods that can compromise chemical compatibility and purity. The advantage of MST is that the PTFE membrane remains robust and durable in highly corrosive acids, bases, and organic compounds.
  • Non-dewetting PTFE membrane
  • Provides increased tool uptime
  • All fluoro-polymer construction
  • Provided completely prewet
  • High temperature and pressure capabilities
  • Very high flow rates
  • Low differential pressure
  • Manufactured in a cleanroom environment
  • 100% integrity tested
Specifications

Materials of Construction

 
Components Materials
Filter Medium Surface-modified PTFE
Media Support PTFE
Inner Core / Outer Cage PFA
End Caps PFA
Sealing methods Melt seal
O-ring (for cartridge) FEP Encapsulated fluoroelastomer
Housing (for KC type) PFA
 

Removal Ratings and Operating Conditions

KC (Kleen-Change®) Assembly

 
Removal Ratings 0.05 μm
Configurations T flow, In-line
Filter area 1.2 m2 / 12.9 ft2
Maximum Operating Temperature 170 ºC / 338 ºF
Maximum Operating Pressure 0.49 MPaG < 25 °C / 71 psig < 77 °F
0.39 MPaG < 60 °C / 57 psig < 140 °F
0.34 MPaG < 90 °C / 49 psig < 194 °F
0.20 MPaG < 120 °C / 29 psig < 248 °F
0.15 MPaG < 150 °C / 22 psig < 302 °F
0.12 MPaG < 170 °C / 17 psig < 338 °F
 

Cartridge

 
Removal Ratings 0.05 μm
Configurations ABF1, MRF1
Filter area ABF1: 1.2 m2 / 12.9 ft2
MRF1: 1.1 m2 / 11.8 ft2
Maximum Operating Temperature 170 ºC / 338 ºF
Maximum Forward differential pressure 0.59 MPa @ 50 °C / 85 psid @ 120 °F
 
Performance

UltiKleen™ Excellar Filter

Pressure Drop vs. Liquid Flow Rate (Water 20 ºC )1

Pressure Drop vs. Liquid Flow Rate
1 Typical flow rates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Unit conversion: 1 bar = 0.1 MPa


UltiKleen™ Excellar KC Assemblies

Pressure Drop vs. Liquid Flow Rate (Water 20 ºC )1

Pressure Drop vs. Liquid Flow Rate
1 Typical flow rates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Unit conversion: 1 bar = 0.1 MPa
Type
Filter Cartridges
Additional Information

Dimensions

UltiKleen™ Excellar Filter



 
Configurations Nominal Cartridge Length
mm inch
ABF1 286 11.2
MRF1 264 10.4
 


UltiKleen™ Excellar KC Assemblies

Dimensions
 
Symbols Nominal length (mm / in.)
L1 416 mm / 16.4 in.
L2 281 mm / 11.1 in.
L3 430 mm / 16.9 in.
L4 282 mm / 11.1 in.
L5 180 mm / 7.1 in.
L6 106 mm / 4.2 in.
 
Ordering Information

UltiKleen™ Excellar Filter


ABF1GP [1] 3EH1 [2]
MRF1GP [1] 25EH1 [2]

Table 1

 
Code Removal Ratings
D 0.05 μm
 

Table 2

 
Code Prewet Option
-K3 Prewet filter ( packaged in DI water)
-K7 Prewet filter ( packaged in DI water), Low metal extractables2
 
2 Please contact Pall on the extractable conditions


UltiKleen™ Excellar KC Assemblies


LDF [1] [2] GP [3] [4] E [5] [6]

Table 1

 
Code Flow
T T flow
N In-line
 

Table 2

 
Code Cartridge Length
05 4 inch
1 10 inch
 

Table 3

 
Code Removal Ratings
D 0.05 μm
 

Table 4

 
Code Inlet/Outlet Vent/Drain Memo
Head end Bowl end
6 33 in. male 14 in. male 14 in. male In-line (5 in. only)
8 12 in. male 14 in. male 14 in. male In-line
9 12 in. female 12 in. male 12 in. female In-line
12 34 in. male 12 in. male 12 in. male T flow
12 34 in. male 14 in. male 14 in. male In-line
13 34 in. male 12 in. male 12 in. male T flow / In-line
 

Table 5

 
Code Connections
0 Non-connection
1 20 series (Flowell)
2 Super Pillar Type (Nippon Pillar)3
51 Flare style
6 FinalLock4
71 Super Pillar 300 P series (Nippon Pillar)
72 Super Pillar 300 P series L type (Nippon Pillar)
8 60 series (Flowell)
9 11CR series (Flowell)
 

Table 6

 
Code Prewet Option
-K3 Prewet filter ( packaged in DI water)
-K7 Prewet filter ( packaged in DI water), Low metal extractables5
 
3 Pillar is a trademark of Nippon Pillar Packing Co.
4 FinalLock is a trademark of Kurabo Industries Ltd.
5 Please contact Pall on the extractable conditions.
6 Part numbers in conbination with all codes are not always availbale.
Please contact Pall for the part number availability.
Application
Chemicals, Wet etch & cleans