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High Flow Filter For Etchant Applications

Description

The High Flow Filter is designed for TFT LCD liquid applications, such as wet etching and cleaning. Its large diameter, inside out flow path and unique, high area, pleated construction allow for a long service life1. The filter is very economical due to its high flow capacity. Far fewer filters are thus required, compared to standard size cartridges.

Features and Benefits

  • Large filter diameter, 152 mm / 6.3 in. nominal, equates to fewer cartridges and smaller housing footprint
  • Easy filter change-out
  • 249 mm / 9.8 in. and 526 mm / 20.7 in. lengths available
  • High area, pleated construction for low differential pressure and high dirt capacity
  • PTFE medium for excellent etchant compatibility
  • Long service life time
  • Inside out flow pattern further enables high flow rates
  • Robust design Outer Cage and Center Core
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Description

Description

The High Flow Filter is designed for TFT LCD liquid applications, such as wet etching and cleaning. Its large diameter, inside out flow path and unique, high area, pleated construction allow for a long service life1. The filter is very economical due to its high flow capacity. Far fewer filters are thus required, compared to standard size cartridges.

Features and Benefits

  • Large filter diameter, 152 mm / 6.3 in. nominal, equates to fewer cartridges and smaller housing footprint
  • Easy filter change-out
  • 249 mm / 9.8 in. and 526 mm / 20.7 in. lengths available
  • High area, pleated construction for low differential pressure and high dirt capacity
  • PTFE medium for excellent etchant compatibility
  • Long service life time
  • Inside out flow pattern further enables high flow rates
  • Robust design Outer Cage and Center Core

Specifications

Materials of Construction
Components Materials
Filter Medium PTFE
Removal Rating 3 μm
Support, drainage Polypropylene
Support core Polypropylene
End caps and Core Polypropylene
O-ring FEP encapsulated fluoroelastomer

 
Maximum Operating Temperature 82 °C / 180 °F
Maximum forward
differential pressure		 0.34 MPa @ 50 °C
50 psi @ 122 °F
Housings Ultipleat high flow plastic housing P / N : 1HFVV - 09GF25H, 1HFVV - 2GF41H
(For availability of specific options and housing details, please contact your Pall Corporation representative.)

Applications

Pressure Drop vs. Liquid flow Rate (Water, 20℃)1


1 For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise

Since etchants can vary significantly, it is recommended that the filter be tested for compatibility at the service temperature to ensure long service life.

Performance

Pressure Drop vs. Liquid flow Rate (Water, 20℃)1


1 For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise

Since etchants can vary significantly, it is recommended that the filter be tested for compatibility at the service temperature to ensure long service life.

Type

Filter Cartridges

Ordering Information

Part Numbers

EHF6 [1] [2] H1]
Table 1
 
Code Length
09 249 mm / 9 in
20 526 mm / 20 in
 

Table 2
 
Code Removal Ratings
EF030 3 μm
 

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