Emflon® Filter (Gas Filtration) product photo Primary L

Emflon® Filter (Gas Filtration)

Emflon filter elements are designed for ≥ 3 nm filtration of bulk gas applications found in the semiconductor industry.

Features

  • Wide variety of applications
  • High particle retention
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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Description
Emflon filter elements are designed for ≥ 3 nm filtration of bulk gas applications found in the semiconductor industry.

Features

  • Wide variety of applications
  • High particle retention
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested
Specifications
 
Components Materials
Filter Medium PTFE
Media Support Polypropylene
Inner Core Polypropylene
Outer Cage Polypropylene
End Caps Polypropylene
O-ring Options Acid proof fluoroelastomer,
FEP Encapsulated fluoroelastiomer
 
 
 
Removal Ratings ≥ 3 nm
Filter Areas 10" / 254 mm : 9.45 ft2 / 0.88 m2
Nominal Length 10" / 254 mm
20“ / 508 mm
30" / 762 mm
40“ / 1,016 mm
Diameter 2.75" / 70 mm
O-ring Size / End Caps Code 3 (222 double O-ring / flat end)
Code 8 (222 double O-ring / finned end)
Code 7 (226 double O-ring bayonet lock / finned end)
Maximum Operating Temperature 194 °F / 90 °C
Maximum forward differential pressure 80 psid @ 120 °F / 5.5 bar @ 50 °C
50 psid @ 194 °F / 3.5 bar @ 90 °C
 
Performance

Pressure Drop vs. Gas Flow Rate

Cartridge Style AB1
Type
Cartridges and Elements
Use
Filtration, Gas Filtration
Ordering Information

Part Numbers / Ordering Information

AB [1] [2] [3] E [4]

Table 1
 
Code Nominal length (mm / in)
1 254 / 10
2 508 / 20
3 762 / 30
4 1,016 / 40
 

Table 2
 
Code Removal Ratings
FR ≥ 3 nm
 

Table 3
 
Code O-ring Specifications
7 AS568A-226
8 AS568A-222
3 AS568A-222
 

Table 4
 
Code O-ring Materials1
H1 FEP Encapsulated Fluoroelastomer
HF Acid-proof Fluoroelastomer
 
1Other O-ring material options available.

Representative example part numbers


AB1FR3EHF AB2FR8EHF AB3FR7EHF AB4FR7EHF
AB1FR3EH1 AB2FR7EHF AB3FR8EHF AB4FR3EHF
AB1FR7EH1 AB2FR3EHF AB3FR3EHF  
AB1FR3EHF AB2FR3EH1 AB3FR3EH1  
  AB2FR7EH1    
Application
Process gas filtration, Process gas filtration
Segment
Display
Photovoltaics
Semiconductor