Emflon® Filter (Gas Filtration) product photo Primary L

Emflon® Filter (Gas Filtration)

Emflon filter elements are designed for ≥ 3 nm filtration of bulk gas applications found in the semiconductor industry.

Features

  • Wide variety of applications
  • High particle retention
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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Datasheets

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Description

Emflon filter elements are designed for ≥ 3 nm filtration of bulk gas applications found in the semiconductor industry.

Features

  • Wide variety of applications
  • High particle retention
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested

Specifications

 
Components Materials
Filter Medium PTFE
Media Support Polypropylene
Inner Core Polypropylene
Outer Cage Polypropylene
End Caps Polypropylene
O-ring Options Acid proof fluoroelastomer,
FEP Encapsulated fluoroelastiomer
 
 
 
Removal Ratings ≥ 3 nm
Filter Areas AB1 MCY1001 MDY1002
10" / 254 mm : 9.45 ft2 / 0.88 m2 10" / 254 mm : 9.26 ft2 / 0.86 m2 20" / 508 mm : 18.52 ft2 / 1.72 m2
Nominal Length 10" / 254 mm
20“ / 508 mm
30" / 762 mm
40“ / 1,016 mm
20“ / 508 mm
30" / 762 mm
Diameter 2.75" / 70 mm
O-ring Size / End Caps Code 3 (222 double O-ring / flat end)
Code 8 (222 double O-ring / finned end)
Code 7 (226 double O-ring bayonet lock / finned end)
Maximum Operating Temperature 194 °F / 90 °C
Maximum forward differential pressure 80 psid @ 120 °F / 5.5 bar @ 50 °C
50 psid @ 194 °F / 3.5 bar @ 90 °C
 

Performance

Pressure Drop vs. Gas Flow Rate

Cartridge Style AB1

Ordering Information

Part Numbers / Ordering Information

O-Ring Seal

AB [1] [2] [3] E [4]

Table 1
 
Code Nominal length (mm / in)
1 254 / 10
2 508 / 20
3 762 / 30
4 1,016 / 40
 

Table 2
 
Code Removal Ratings
FR ≥ 3 nm
 

Table 3
 
Code O-ring Specifications
7 AS568A-226
8 AS568A-222
3 AS568A-222
 

Table 4
 
Code O-ring Materials1
H1 FEP Encapsulated Fluoroelastomer
HF Acid-proof Fluoroelastomer
 
1Other O-ring material options available.

Gasket seal

MCY1001 [7] E [8]

MDY100 [9] [7] E [8]

Table 7
 
Code Removal Ratings
FR ≥ 3 nm
 

Table 8
 
Code Gasket Materials
H13 NBR
H2 PTFE
H Fluoroelastomer
J EPDM
 

Table 9
 
Code Nominal length (mm / in)
2 508 / 20
3 762 / 30
 

Representative example part numbers


O-Ring Seal

AB1FR3EHF AB2FR8EHF AB3FR7EHF AB4FR7EHF
AB1FR3EH1 AB2FR7EHF AB3FR8EHF AB4FR3EHF
AB1FR7EH1 AB2FR3EHF AB3FR3EHF  
AB1FR3EHF AB2FR3EH1 AB3FR3EH1  
  AB2FR7EH1    


Gasket seal

MCY1001FREH2 MDY1002FREH13 MDY1003FREH13
MCY1001FREJ MDY1002FREH2

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