PhotoKleen™ EZD-3 Filter Assembly product photo Primary L

PhotoKleen™ EZD-3 Filter Assembly

The PhotoKleen™ EZD-3 filter is designed for extremely small resist pump installations. It is specifically designed for small-volume dispense systems, which have the smallest footprint. The PhotoKleen EZD-3 filter unit consists of a quick-disconnect head manifold and a High Density Polyethylene (HDPE) capsule. This configuration allows for safe, quick, and easy filter change outs. Three filter media – PTFE, HDPE and nylon 6,6 – are available. The naturally hydrophilic nylon 6,6 membrane allows for spontaneous wettability. This minimizes photochemical waste by providing quick start up and minimized bubble generation.
  • Capsule-style filter assembly
  • Top in / top out flow direction, with inlet flow stream down to the bottom
  • Minimized hold-up volume (40 mL)
  • Quick filter replacement (one step)
  • Optimized for 60 mm-width resist pump for reduced dispense system
  • Minimized dead space
  • Reduces chemical waste during filter startup and change out


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Description
The PhotoKleen™ EZD-3 filter is designed for extremely small resist pump installations. It is specifically designed for small-volume dispense systems, which have the smallest footprint. The PhotoKleen EZD-3 filter unit consists of a quick-disconnect head manifold and a High Density Polyethylene (HDPE) capsule. This configuration allows for safe, quick, and easy filter change outs. Three filter media – PTFE, HDPE and nylon 6,6 – are available. The naturally hydrophilic nylon 6,6 membrane allows for spontaneous wettability. This minimizes photochemical waste by providing quick start up and minimized bubble generation.
  • Capsule-style filter assembly
  • Top in / top out flow direction, with inlet flow stream down to the bottom
  • Minimized hold-up volume (40 mL)
  • Quick filter replacement (one step)
  • Optimized for 60 mm-width resist pump for reduced dispense system
  • Minimized dead space
  • Reduces chemical waste during filter startup and change out
Specifications

Specifications (Filter Capsules)

Materials of Construction

Components Materials
Filter Media P-Nylon PE-Kleen P Emflon
Hydrophilic Nylon6,6 High Density Polyethylene (HDPE) PTFE
Support and Drainage High Density Polyethylene (HDPE)
Core, Cage, and End Caps High Density Polyethylene (HDPE)
Housing High Density Polyethylene (HDPE)
O-ring Kalrez1

1Kalrez is a registered trademark of E. I. du Pont de Nemours and Company

Removal Ratings (μm) P-Nylon PE-Kleen P Emflon
20 nm 40 nm, 0.1, 0.2 10 nm 30 nm, 0.05 0.05, 0.1, 0.2
Nominal Filter Areas 710 cm2 / 0.76 ft2 660 cm2 / 0.71 ft2 770 cm2 / 0.82 ft2 660 cm2 / 0.71 ft2 660 cm2 / 0.71 ft2
Maximum Forward Differential Pressure 0.27 MPa @ 20 °C / 39 psid @ 68 °F 0.29 MPa @ 30 °C / 42 psid @ 86 °F 0.29 MPa @ 30 °C / 42 psid @ 86 °F
Maximum Operating Temperature 30 °C / 86 °F
Maximum Operating Pressure 0.29 MPaG @ 30 °C / 42 psig @ 86 °F

Specifications (Head Manifold)

Materials of Construction

Components Materials
Head PFA / HDPE
Fitting PFA / PCTFE
Stage and lever SUS304

Connections

Type Inlet / Outlet Vent
Super Pillar3 type 1/4" (6.35 x 3.9 mm) Elbow union 1/4" (6.35 x 3.9 mm) Elbow union
1/4" (6.35 x 3.9 mm) Straight union 1/4" (6.35 x 3.9 mm) Straight union
Flowell4 60 series 1/4" (6.35 x 3.9 mm) Fitting 1/4" (6.35 x 3.9 mm) Fitting
4 x 3 mm / 4 x 2 mm Fitting 4 x 3 mm / 4 x 2 mm Fitting
5 x 3 mm Fitting 5 x 3 mm Fitting

3Pillar is a trademark of Nippon Plillar Packing Co.,Ltd.
4Flowell is a trademark of Flowell Co.,Ltd.

Performance

Typical Flow Characteristics - 1cP fluid, 20℃

P Emflon Filter (PTFE media)


 PE-Kleen Filter (HDPE media)

P-Nylon Filter (Nylon 6,6 media)
 
Type
Assemblies, Capsules
Additional Information

Filter Media Electron Micrograph

P-Nylon (Nylon 6,6)

PE-Kleen (HDPE)

P Emflon (PTFE)

Dimensions Dimensions Dimensions

Dimensions

Dimensions
Dimensions
Dimensions Dimensions
Dimensions
Ordering Information

Part Numbers / Ordering Information (Filter Capsules)

PHD11 [1] EH11B

Table 1

 
Code Filter Media Removal ratings
ANM P-Nylon
(Asymmetric Nylon 6,6)
20 nm
AND 40 nm
UNI P-Nylon
(Nylon 6,6)
0.1 μm
UNA 0.2 μm
UG001 PE-Kleen
(HDPE)
10 nm
UG003 30 nm
UG005 50 nm
UFD P Emflon
(PTFE)
50 nm
UFT 0.1 μm
UFR 0.2 μm
 

Spare Parts

 
Produt Name Part Number Memo
Dummy Capsule PHDC11H11B O-ring : Kalrez
PHDC12H11B-XP+ O-ring : Kalrez
Special Clean Product
 

Part Numbers / Ordering Information (Head Manifold)

PHF11G [1]

Table 1

 
Code Inlet / Outlet Vent
PS44LD 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union
PS44LTD 1/4" (6.35 x 3.9 mm) Super Pillar Straight union 1/4" (6.35 x 3.9 mm) Super Pillar Straight union
FS44WLTD 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting
FS44MLD 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting
FS55MLTD 5 x 3 mm Flowell 60 Fitting 5 x 3 mm Flowell 60 Fitting
 

Representative example part numbers

(Head Manifold)

 

(Capsules)

PHF11GFS44WLTD

 

PHD11UNAEH11B

PHF11GFS44MLD

 

PHD11UNIEH11B

PHF11GPS44LD

PHF11GPS44LTD

 

PHD11ANMEH11B

PHF11GFS55MLTD

 

PHD11ANDEH11B

 

PHD11UG005EH11B

 

PHD11UG003EH11B

 

PHD11UG001EH11B

 

PHD11UFREH11B

 

PHD11UFTEH11B

 

PHD11UFDEH11B

Application
Photolithography, Photolithography