PhotoKleen™ EZD Filter Assembly product photo Primary L

PhotoKleen™ EZD Filter Assembly

The PhotoKleen EZD filter assembly is designed for clean, simple, safe and fast filter change outs in point-of-use photochemical dispense applications. The PhotoKleen EZD filter assembly consists of a head manifold interface and an HDPE (High Density Polyethylene) capsule filter. It is ideal for improving the performance of existing installations and can be specified on new, state-of-theart dispense pumps.
  • Low hold-up volume
  • Manufactured in a cleanroom environment
  • Capsule-style filter assembly
  • Top in / top out flow direction
  • Quick filter disconnect (one step)
  • Minimized dead space
  • Reduces chemical waste during filter start up and change out
  • Minimized organic extractables by XP option for rapid start-up and reducing chemical waste
  • XP option quarantees low organic, metal and particle cleanliness for the most advanced processes


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Description
The PhotoKleen EZD filter assembly is designed for clean, simple, safe and fast filter change outs in point-of-use photochemical dispense applications. The PhotoKleen EZD filter assembly consists of a head manifold interface and an HDPE (High Density Polyethylene) capsule filter. It is ideal for improving the performance of existing installations and can be specified on new, state-of-theart dispense pumps.
  • Low hold-up volume
  • Manufactured in a cleanroom environment
  • Capsule-style filter assembly
  • Top in / top out flow direction
  • Quick filter disconnect (one step)
  • Minimized dead space
  • Reduces chemical waste during filter start up and change out
  • Minimized organic extractables by XP option for rapid start-up and reducing chemical waste
  • XP option quarantees low organic, metal and particle cleanliness for the most advanced processes
Specifications

Specifications (Filter Capsules)

Materials of Construction

 
Components Materials
Filter Medium P-Nylon : Hydrophilic Nylon 6,6
PE-Kleen : High Density Polyethylene (HDPE)
P Emflon : PTFE
Support and Drainage High Density Polyethylene (HDPE)
Core, Cage and End Caps High Density Polyethylene (HDPE)
Housing High Density Polyethylene (HDPE)
O-ring Perfluoro elastomer, Kalrez1, EPDM
 
1 Kalrez is a registered trademark of E. I. du Pont de Nemours and Company
 
Removal Ratings (nm) P-Nylon PE-Kleen P Emflon
2, 5, 10, 20, 40, 0.1 μm, 0.2 μm 2, 5, 10, 30, 50 50, 0.1 μm, 0.2 μm
Nominal Filter Areas PHD22 XN2L : 2900 cm2
HXN5 : 1900 cm2
AN01, ANM : 2500 cm2
UG2, UG5 : 2600 cm2
UG001 : 2500 cm2
2800 cm2
AND : 2500 cm2 UG003 : 2200 cm2
UNI, UNA : 1960 cm2 UG005 : 3200 cm2
PHD44 XN2L : 5900 cm2
HXN5 : 4100 cm2
AN01, ANM, AND: 5300 cm2
UG2, UG5 : 5200 cm2
UG001 : 5100 cm2
4400 cm2
UNI, UNA : 3340 cm2 UG003 : 4400 cm2
UG005 : 5400 cm2
Maximum Forward Differential Pressure 0.27 MPa @ 20 °C / 39 psid @ 60 °F 0.34 MPa @ 23 °C / 49 psid @ 73 °F 0.34 MPa @ 23 °C / 49 psid @ 73 °F
Maximum Operating Temperature 23 °C / 73 °F
Maximum Operating Pressure 0.39 MPaG @ 23 °C / 57 psig @ 73 °F
 

Filter Media Electron Micrograph

P-Nylon (Nylon 6,6)

P-Nylon (Nylon 6,6)




PE-Kleen (HDPE)

PE-Kleen (HDPE)




P Emflon (PTFE)

P Emflon (PTFE)


Specifications (Head Manifold)

Materials of Construction

 
Components Materials
Head Polypropylene (Non Wetted)
Fitting PTFE / PFA
Ring-nut SCS13 equivalent (with knob for handling aids)
 

Connections

 
Type Inlet / Outlet Vent
Super Pillar2 type 1/4" (6.35 x 3.9 mm) Elbow union 1/4" (6.35 x 3.9 mm) Elbow union
3/8" (9.53 x 6.3 mm) Elbow union
1/2" (12.7 x 9.5 mm) Elbow union
1/4" (6.35 x 3.9 mm) Straight union 1/4" (6.35 x 3.9 mm) Straight union
3/8" (9.53 x 6.3 mm) Straight union
Flowell3 60 series 1/4" (6.35 x 3.9 mm) Fitting 1/4" (6.35 x 3.9 mm) Fitting
6 x 4 mm Fitting 4 x 3 mm Fitting
8 x 6 mm Fitting
10 x 8 mm Fitting
6 x 4 mm Fitting 6 x 4 mm Fitting
10 x 8 mm Fitting
 
2 Pillar is a trademark of Nippon Plillar Packing Co.,Ltd.
3 Flowell is a trademark of Flowell Co.,Ltd.
Performance

Typical Flow Characteristics - 1cP fluid, 20℃

1/4" Super Pillar fitting : PHYGPS44B
PHYGPS44BS
1/4 super pillar fitting

Typical Flow Characteristics - 1cP fluid, 20℃

3/8" Super Pillar fitting : PHYGPS64B
PHYGPS64BS
3/8 Super Pillar fitting

Typical Flow Characteristics - 1cP fluid, 20℃

1/2" Super Pillar fitting : PHYGPS84B
1/2 super pillar fitting

Typical Flow Characteristics - 1cP fluid, 20℃

6 mm Flowell 60 fitting : PHYGFS66MAB
6 mm Flowell 60 fitting

Typical Flow Characteristics - 1cP fluid, 20℃

8 mm Flowell 60 fitting : PHYGFS84MB
8 mm Flowell 60 fitting

Typical Flow Characteristics - 1cP fluid, 20℃

10 mm Flowell 60 fitting : PHYGFS104MB
PHYGFS106MB
10 mm Flowell 60 fitting

Typical Flow Characteristics - 1cP fluid, 20℃

10 mm Flowell 60 fitting
10 mm Flowell 60 fitting
Type
Assemblies, Capsules
Additional Information

Dimensions

Filter Capsule
  Dummy Capsule

Dimensions

Super Pillar fitting



Flowell 60 fitting

Ordering Information

Part Numbers / Ordering Information (Filter Capsules)

PHD [1][2] E [3][4][5]

Table 1

 
Code Length (Nominal)
mm inch
22 99 3.9
44 159 6.3
 

Table 2

 
Code Filter Media Removal ratings
XN2L P-Nylon
(Asymmetric Nylon 6,6)
2 nm
HXN5 5 nm
AN01 10 nm
ANM 20 nm
AND 40 nm
UNI P-Nylon
(Nylon 6,6)
0.1 μm
UNA 0.2 μm
UG2 PE-Kleen
(HDPE)
2 nm
UG5 5 nm
UG001 10 nm
UG003 30 nm
UG005 50 nm
UFD P-Emflon
(PTFE)
50 nm
UFT 0.1 μm
UFR 0.2 μm
 

Table 3

 
Code O-ring materials
H23 1/4", 3/8", 6 mm, 8 mm Perfluoro elastomer
 H11 Kalrez
J EPDM
 

Table 4

 
Code Head Manifold Connections
absent 1/4", 3/8", 6 mm, 8 mm
-2  1/2", 10 mm
 

Table 5

 
Code Cleanliness Options
absent standard products
-XP low organic, metal and particle cleanliness
 

Part Numbers / Ordering Information (Head Manifold)

PHYG [1]

Table 1

 
Code Inlet / Outlet Vent
PS44B 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union
PS64B 3/8" (9.53 x 6.3 mm) Super Pillar Elbow union
PS84B 1/2" (12.7 x 9.5 mm) Super Pillar Elbow union
PS44BS 1/4" (6.35 x 3.9 mm) Super Pillar Straight union 1/4" (6.35 x 3.9 mm) Super Pillar Straight union
PS64BS 3/8" (9.53 x 6.3 mm) Super Pillar Straight union
FS44B 1/4" (6.35 x 3.9 mm) Flowell 60 Fitting 1/4" (6.35 x 3.9 mm) Flowell 60 Fitting
FS64MB 6 x 4 mm Flowell 60 Fitting 4 x 3 mm Flowell 60 Fitting
FS84MB 8 x 6 mm Flowell 60 Fitting
FS104MB 10 x 8 mm Flowell 60 Fitting
FS66MB 6 x 4 mm Flowell 60 Fitting 6 x 4 mm Flowell 60 Fitting
FS106MB 10 x 8 mm Flowell 60 Fitting
 

Spare Parts

 
Product Name Part Number Applicable Head Manifold
Dummy Capsule PHDC1H23 PHYGPS44B(S), PHYGPS64B(S), PHYGFS64MB,
PHYGFS64MB, PHYGFS66MB, PHYGFS84MB
PHDC2H23 PHYGPS84B, PHYGFS104MB, PHYGFS106MB
Mounting Bracket PHFGBRACKET14 All
 

Representative example part numbers

(Head Manifold)
PHYGPS44B
PHYGPS64B
PHYGPS84B
PHYGFS44B
PHYGFS64MB
PHYGFS84MB
PHYGFS104MB
PHGF-Bracket 05
(Mounting Bracket)
      (Capsules)
PHD22UNIEH11
PHD22UNIEJ
PHD22UNDEJ
PHD22UNDEH11
PHD44UNDEH11-2


PHD22ANDEH11
PHD44ANDEH11
PHD22ANMEH11
PHD44ANMEH11


PHD44UFNEH11
PHD22UFREH11
PHD22UFDEH11
PHD22UFTEH11
PHD44FTEH11
PHD44UFTEH11-2
PHD22UFDEH11
PHD44UFDEH11
PHD44UFDEH11-2


PHD22UG005EH11
PHD44UG005EH11
PHD22UG003EH11
Application
Photolithography, Photolithography, Photolithography