UltiKleen™ - CDS Filter product photo Primary L

UltiKleen™ - CDS Filter

The UltiKleen-CDS filter is Pall's standard all-fluoro-polymer cartridge for the semiconductor industry. It is designed primarily for use in today’s bulk chemical delivery systems.
  • Excellent compatibility
  • Low extractable levels
  • All fluoro-polymer construction
  • Three removal ratings available
  • High temperature and pressure capabilities
  • Optimized crescent shaped Ultipleat® filter design
  • Very high flow rates
  • Low differential pressure
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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Description
The UltiKleen-CDS filter is Pall's standard all-fluoro-polymer cartridge for the semiconductor industry. It is designed primarily for use in today’s bulk chemical delivery systems.
  • Excellent compatibility
  • Low extractable levels
  • All fluoro-polymer construction
  • Three removal ratings available
  • High temperature and pressure capabilities
  • Optimized crescent shaped Ultipleat® filter design
  • Very high flow rates
  • Low differential pressure
  • Manufactured in a cleanroom environment
  • 100% integrity tested
Specifications

Materials of Construction

 
Components Materials
Filter Medium PTFE
Media Support PTFE
Core PFA
Cage PFA
End Caps PFA
Sealing methods Heat Melt Seal
O-ring FEP encapsulated fluoroelastomer, Kalrez1
 
1 Kalrez is a registered trademark of DuPont Performance Elastomers

Removal Ratings and Operating Conditions

 
Removal Ratings 0.2 μm, 0.1 μm, 0.05 μm
Configurations AB04 ABF1 / MRF1 ABF2 ABF3
Nominal Filter Areas 0.5 m2 / 5.7 ft2 1.0 m2 / 11 ft2 2.0 m2 / 21 ft2 3.0 m2 / 32 ft2
Nominal Length 127 mm / 4 in. 254 mm / 10 in. 508 mm / 20 in. 762 mm / 30 in.
Maximum Operating Temperature 185 °C / 365 °F
Maximum Forward Differential Pressure 0.69 MPa < 50 °C / 100 psid < 120 °F
0.41 MPa < 110 °C / 60 psid < 230 °F
0.24 MPa < 170 °C / 35 psid < 335 °F
0.14 MPa < 185 °C / 20 psid < 365 °F
 

Dimensions (nominal)





Performance

Typical Flow Characteristics - 1cP fluid, 20℃

Type
Cartridges and Elements
Use
Filtration
Ordering Information
ABF [1] UF [2] [3] E [5] [6]

MRF [1] UF [2] [4] E [5] [6]

Table 1

 
Code Cartridge Nominal Length
Nominal AB type MR type
04 4 130 mm / 5.1 in. -
1 10 284 mm / 11.2 in. 262 mm / 10.3 in.
2 20 544 mm / 21.4 in. 503 mm / 19.8 in.
3 30 794 mm / 31.3 in. -
 

Table 2

 
Code Removal Ratings
D 0.05 μm
T 0.1 μm
R 0.2 μm
 

Table 3

 
Code O-ring Size
3 AS568A-222
 

Table 4

 
Code O-ring Size
25 AS568A-222
 

Table 5

 
Code O-ring Materials
H1 FEP encapsulated fluoroelastomer
H11 Kalrez
 

Table 6

 
Code Prewet Option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water),
Low metal extractables 2
 
2 Please contact Pall on the extractable conditions.
3 Part numbers in combination with all codes are not always available. Please contact Pall for part number availability.
Application
Wet Etch Chemicals, Chemicals, Wet etch & cleans