Profile® Star Filters product photo Primary L

ProfileĀ® Star Filters

Profile Star filters are pleated, all polypropylene depth filters ideally suited for the removal of agglomerated particles and gels from slurries used in the chemical mechanical polishing (CMP) of oxide, tungsten and copper.
  • Deep, wide pleats for long service life in liquids with high levels of suspended solids
  • High filter area, combined with continuously profiled pore structure minimizes sheer
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles


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Description
Profile Star filters are pleated, all polypropylene depth filters ideally suited for the removal of agglomerated particles and gels from slurries used in the chemical mechanical polishing (CMP) of oxide, tungsten and copper.
  • Deep, wide pleats for long service life in liquids with high levels of suspended solids
  • High filter area, combined with continuously profiled pore structure minimizes sheer
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
Specifications

Specifications

Materials of Construction

 
Components Materials
Filter Medium Polypropylene
Support and drainage Polypropylene
Core,cage and end caps Polypropylene
Housing (DFA) Polypropylene
Gasket options EPDM, Polypropylene
O-ring options EPDM, Silicone, Fluoroelastomer
 
 
Product Name 10 inch cartridges DFA capsules
Removal Ratings (μm) 0.8, 1, 1.5, 3, 5, 10, 15 0.8, 1, 1.5, 3, 5
Maximum Operating Temperature 80 °C / 176 °F 38 °C / 100 °F
Maximum forward
differential pressure
0.50 MPa / 70 psid @ 50 °C / 120 °F
0.34 MPa / 50 psid @ 80 °C / 176 °F
0.34 MPa / 50 psid @ 80 °C / 176 °F
Maximum Operating Pressure - 0.49 MPaG / 71 psig @ 38 °C / 100 °F
 
Performance

Pressure Drop vs. Liquid Flow Rate1 (Water 20 ºC )

Pressure Drop vs. Liquid Flow Rate


  Pressure Drop vs. Liquid Flow Rate

1 Typical flow rates. For liquids with a viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Unit conversion: 1 bar = 0.1 MPa

Type
Cartridges and Elements
Use
Filtration
Ordering Information

Part Numbers Ordering Information

Gasket Seal Filters
PUY [1] A [2] [3]

Table 1

 
Code Cartridge Length (Nominal)
1 254 mm / 10 in
2 508 mm / 20 in
3 762 mm / 30 in
 

Table 2

 
Code Removal Ratings2 (μm)
008 0.83
010 14
015 1.5
030 3
050 5
100 10
150 15
 

Table 3

 
Code Gasket Materials
J EPDM (Standard)
Y1 Polypropylene
 

O-ring Seal Filters
AB [1] A [2] [4] [5]

Table 4

 
Code O-ring Specifications
3 AS568A-222
7 AS568A-226
255 AS568A-222
 

Table 5

 
Code Gasket Materials
J EPDM (Standard)
H4 Silicone
H Fluoroelastomer
 

2 Removal ratings at 99.98% efficiency based on a modified OSU-F2 single pass test in aqueous medium.
3 Removal ratings at 94% efficiency.
4 Removal ratings at 99.8% efficiency.
5 Options for 0.8 μm only.

DFA Capsules
DFA [6] A [7]

Table 6

 
Code Connections Vent / Drain
Tube size Configurations Tube size Configurations
4201 1/4" in NPT male 1/8" in NPT male
5301 16 mm 1/4" Swagelok6 4 mm Swagelok
 

Table 5

 
Code Removal Ratings1 (μm)
008 0.83
010 1
015 1.5
030 3
050 5
 

6 Swagelok is a trademark of Swagelok Co.


Representative example part numbers

AB1A00825J

AB1A0503J

AB2A00825J

AB2A0503J

AB1A0103J

AB1A1003J

AB2A0103J

AB2A1003J

AB1A0153J

AB1A2003J

AB2A0153J

AB2A2003J

AB1A0303J

AB2A0303J

Application
Wet etch & cleans, CMP, Color Filter