UltiKleen™ G2 Excellar ERL Filter and KC Assemblies product photo Primary L

UltiKleen™ G2 Excellar ERL Filter and KC Assemblies

UltiKleen G2 Excellar ERL Filter

The enhanced retention (ER) and improved nondewetting properties of the UltiKleen G2 Excellar ERL filter have enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nanometers (nm) manufacturing node. Designed for critical single-pass point-of-use filtration, the filter’s high flow rate also makes it suitable for recirculation bath applications.

An advanced media support design maximizes the effective filter area of the cartridge. The larger filter area increases dirt-holding capacity, thereby extending service life. The liquid flow rate of the UltiKleen G2 Excellar ERL filter is more than 30% higher than that of the standard UltiKleen Excellar ER filter.

The UltiKleen G2 Excellar ERL filter medium is made using Pall’s proprietary Molecular Surface Tailoring (MST) technology. MST imparts nondewetting properties to the PTFE membrane without adding a chemical layer to the surface of the medium. A hyperfine pore matrix inside the membrane provides significantly improved retention of particles down to 15 nm. The result is a robust, reliable and chemically clean filter suitable for use in aggressive high-temperature cleaning chemistries, including aqueous chemistries such as hot SPM, SC-1 and SC-2.

  • Enhanced retention of particles
  • Robust nondewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra-high-purity fluoro-polymer construction
  • Provided prewet, with Full-fill1ultrapure water package (standard)
  • Low extractables (Single digit ppb 2 in a 5% HCL extraction of 1.5 liters for 24 hours)
  • 100% integrity tested

UltiKleen G2 Excellar ERL KC Assemblies

The Pall UltiKleen G2 KC assemblies, which are made of high-purity PFA, are completely disposable filter units that contain UltiKleen Excellar ERL cartridges. They are specifically designed and ideally suited for high-temperature process chemicals, particularly mixtures of sulfuric acid and hydrogen peroxide (SPM). The unique downstream venting-type assemblies allow bubbles to exhaust from chemicals efficiently and provide higher particle cleanliness levels.

  • Downstream venting available
  • Disposable filter unit with filter cartridge integrally sealed in housing
  • Sealed assembly for safer handling and faster changeout
1 Package is completely filled with ultrapure water.
2 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.


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Description

UltiKleen G2 Excellar ERL Filter

The enhanced retention (ER) and improved nondewetting properties of the UltiKleen G2 Excellar ERL filter have enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nanometers (nm) manufacturing node. Designed for critical single-pass point-of-use filtration, the filter’s high flow rate also makes it suitable for recirculation bath applications.

An advanced media support design maximizes the effective filter area of the cartridge. The larger filter area increases dirt-holding capacity, thereby extending service life. The liquid flow rate of the UltiKleen G2 Excellar ERL filter is more than 30% higher than that of the standard UltiKleen Excellar ER filter.

The UltiKleen G2 Excellar ERL filter medium is made using Pall’s proprietary Molecular Surface Tailoring (MST) technology. MST imparts nondewetting properties to the PTFE membrane without adding a chemical layer to the surface of the medium. A hyperfine pore matrix inside the membrane provides significantly improved retention of particles down to 15 nm. The result is a robust, reliable and chemically clean filter suitable for use in aggressive high-temperature cleaning chemistries, including aqueous chemistries such as hot SPM, SC-1 and SC-2.

  • Enhanced retention of particles
  • Robust nondewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra-high-purity fluoro-polymer construction
  • Provided prewet, with Full-fill1ultrapure water package (standard)
  • Low extractables (Single digit ppb 2 in a 5% HCL extraction of 1.5 liters for 24 hours)
  • 100% integrity tested

UltiKleen G2 Excellar ERL KC Assemblies

The Pall UltiKleen G2 KC assemblies, which are made of high-purity PFA, are completely disposable filter units that contain UltiKleen Excellar ERL cartridges. They are specifically designed and ideally suited for high-temperature process chemicals, particularly mixtures of sulfuric acid and hydrogen peroxide (SPM). The unique downstream venting-type assemblies allow bubbles to exhaust from chemicals efficiently and provide higher particle cleanliness levels.

  • Downstream venting available
  • Disposable filter unit with filter cartridge integrally sealed in housing
  • Sealed assembly for safer handling and faster changeout
1 Package is completely filled with ultrapure water.
2 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
Specifications

Materials of Construction

 
Filter medium Surface-modified PTFE
Media support PTFE / PFA
Core, cage and end caps PFA
Sealing method Melt seal
Housing PFA
O-ring options FEP-encapsulated fluoroelastomer, Kalrez3 and Chemraz4
 
3 Kalrez is a registered trademark of DuPont Performance Elastomers.
4 Chemraz is a registered trademark of Greene, Tweed & Co.

Removal Ratings and Operating Conditions

 
  UltiKleen G2 Excellar ERL Filter UltiKleen G2 Excellar ERL KC Assemblies
  ABFG1 ABFG2 ABFG3 T-flow, in-line, L-flow (10 in.)
Removal rating 15 nm, 20 nm
Filter area 3 m2 / 32.3 ft2 6 m2 / 64.6 ft2 9 m2 / 96.9 ft2 3 m2 / 32.3 ft2
Maximum operating temperature 180˚C / 356˚F
Maximum operating pressure 0.59 MPaG (85.6 psig) @ 50˚C (120˚F) 0.5 MPaG (72.5 psig) @ 25˚C (77˚F)
0.4 MPaG (58 psig) @ 60˚C (140˚F)
0.35 MPaG (50.7 psig) @ 90˚C (194˚F)
0.20 MPaG (29 psig) @ 120˚C (248˚F)
0.15 MPaG (21.8 psig) @ 150˚C (302˚F)
0.12 MPaG (17.4 psig) @ 170˚C (338˚F)
 

Dimensions (nominal)

UltiKleen G2 Excellar ERL KC Assemblies

In-Line L-Flow
In-Line L-Flow
T-Flow T-Flow Downstream Vent
T-Flow T-Flow Downstream Vent

Dimensions by Configuration

UltiKleen G2 Excellar ERL KC Assembly (LDFG / LDFV)

 
In-line Nominal
Length (L)
(mm / in.)
T-Flow Nominal
Length (L)
(mm / in.)
VT style Nominal
Length (L)
(mm / in.)
L-flow Nominal
Length (L)
(mm / in.)
VL style Nominal
Length (L)
(mm / in.)
12E2 396.5 / 15.6 12E2 408 / 16.1 12E2 377 / 14.8 12E2 408 / 16.1 12E2 440 / 17.35
12E51 412 / 16.2 12E71 403 / 15.9 128E2 385 / 15.2        
124E51 412 / 16.2 13E0 495 / 19.5 12E71 377 / 14.8        
16E8 428 / 16.9 13E1 432 / 17            
16E51 436 / 17.2 13E2 442 / 17.4 128E71 402 / 15.8        
17E0 448 / 17.6 13E6 416 / 16.4 128E72 402 / 15.8        
17E1 445 / 17.7 13E9 433 / 17.1 13E1 445 / 17.5        
17E51 442 / 17.4 13E51 473 / 18.6 13E51 444 / 17.4        
17E71 462 / 18.2 13E71 444 / 17.5 168E71 403 / 15.9        
        168E72 403 / 15.9        
 
Performance

Typical Flow Characteristics – 1 cP fluid, 20 °C


 

Type
Assemblies, Capsules, Cartridges and Elements
Ordering Information

UltiKleen G2 Excellar ERL Filter

ABFG [1] GP [2] L3EH1[3]

Table 1

 
Code Length (Nominal) mm / in.
1 244 / 10
2 487 / 20
3 726 / 30
 

Table 2

 
Code Removal Rating
15 15 nm
K 20 nm
 

Table 3

 
Code Prewet Option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 
5 Contact your local Pall representative for information about extractables.

UltiKleen G2 Excellar ERL KC Assemblies6

LDF [1] [2] 1GP [3] L [4] E[5] [6]

Table 1

 
Code Downstream Vent
G N/A
V Available
 

Table 2

 
Code Flow
T T-flow
N In-line
L L-flow
 

Table 3

 
Code Removal Rating
15 15 nm
K 20 nm
 

Table 4

 
Code Inlet / Outlet Vent / Drain Type
Head End Bowl End
12 34 in. male 12 in. male 12 in. male T-flow / L-flow
12 34 in. male 12 in. male 12 in. female Downstream venting type
12 34 in. male 38 in. male 38 in. male In-line
124 34 in. male 14 in. male 14 in. male In-line
128 34 in. male 12 in. male 12 in. male Downstream venting type
13 34 in. female 12 in. female 12 in. female T-flow
16 1 in. male 12 in. male 12 in. male T-flow
16 1 in. male 12 in. male 12 in. female Downstream
venting type
16 1 in. male 38 in. male 38 in. male In-line
164 1 in. male 14 in. male 14 in. male In-line
168 1 in. male 12 in. male 12 in. male Downstream venting type
17 1 in. female 12 in. female 12 in. female In-line
 

Table 5

 
Code Connections
0 None
1 Flowell7 20 series
2 Super Pillar8 type
51 Flare style
6 FinalLock9
71 Super Pillar 300 P series
72 Super Pillar 300 P series L type
8 Flowell 60 series
9 Flowell 11CR series
 

Table 6

 
Code Prewet Option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables6
 
6 Disposable capsules are not available with every option. (Refer to codes for options.) Contact your local Pall representative for option availability.
7 Flowell is a trademark of Flowell Corporation.
8 Super Pillar is a trademark of Nippon Pillar Packing Co., Ltd.
9 FinalLock is a trademark of Kurabo Industries Ltd.
Application
Wet etch & cleans, Chemicals, Wet etch & cleans