PG Series Gaskleen® Gas Purifier Assemblies and Manifolds product photo Primary L

PG Series Gaskleen® Gas Purifier Assemblies and Manifolds

Pall's Gaskleen® PG purifier assemblies have been designed to handle process flow rates up to 1,000 slpm.
  • An optional bypass manifold is available complete with isolation valves and backplate for easy mounting.
  • Pall's purification materials are available in every standard configuration.
  • All purifier assemblies contain an integral 316L stainless steel particle filter.
  • 100% helium leak and pressure tested.
  • No detectable metal contribution above background in HCl gas with HCLP material
  • No detectable metal contribution above background in HBr gas with HBRP material
Products in this datasheet may be covered by one or more patents, including US 7,465,692


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Description
Pall's Gaskleen® PG purifier assemblies have been designed to handle process flow rates up to 1,000 slpm.
  • An optional bypass manifold is available complete with isolation valves and backplate for easy mounting.
  • Pall's purification materials are available in every standard configuration.
  • All purifier assemblies contain an integral 316L stainless steel particle filter.
  • 100% helium leak and pressure tested.
  • No detectable metal contribution above background in HCl gas with HCLP material
  • No detectable metal contribution above background in HBr gas with HBRP material
Products in this datasheet may be covered by one or more patents, including US 7,465,692
Specifications

Assembly Flow Rates

  • PG550: 75 slpm
  • PG2400: 500 slpm
  • PG11000: 1,000 slpm

Particle Filter Options

  • PG550/PG2400: 0.4 μm or 0.003 μm
  • PG11000: 0.4 μm

Connections

  • 14 in. or 12 in. gasket seal (VCR1 or compatible) male/male
  • Inlet/outlet isolation valves (for PG11000)

Assembly Material

  • Electropolished 316L SS
  • <0.25 μm/<10 μin Ra internal surface finish

Operating Conditions

  • Maximum operating pressure
    • PG550/PG2400: 3.45 MPa/500 psig
    • PG11000: 1.72 MPa/250 psig
  • Maximum operating temperature:
    • 100 °C/212 °F (INP, SIP, FCP, SF6P)
    • 40 °C/104 °F (GEH4P, OXP, CLXP, HCLP, HBRP, CDAP)
  • EU Pressure Equipment Directive: Assemblies have been evaluated for compliance with the European Union's Pressure Equipment Directive 2014/68/EU and are CE-marked.
1 VCR is a trademark of Swagelok Co.


Technical Information

Impurity Removal as Tested in Specific Gases
Specific Gas Impurity Removal Efficiency
Inert gases: nitrogen, argon, helium, xenon, krypton, neon <1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer
Flammable gases: silane, hydrogen, methane, ethane, cyclopropane, propane, dimethyl ether <1 ppb H2O, CO2, O2, and CO, as tested in argon, nitrogen and hydrogen using APIMS analyzer

<1 ppb H2O, as tested in carbon monoxide using trace moisture analyzer

H2O and siloxanes removed to trace levels, as tested in silane using APIMS
Carbon monoxide <1 ppb Ni(CO)4, and < 1 ppb Fe(CO)5, as tested in carbon monoxide using GC-ECD analyzer
Fluorocarbons: fluoromethane, difluoromethane, trifluoromethane, tetrafluoroethane, pentafluoroethane, heptafluoropropane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane <1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer

<1 ppb O2, as tested in trifluoromethane using trace oxygen analyzer

<10 ppb H2O, as tested in trifluoromethane using trace moisture analyzer and FTIR
Germane <1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer
Sulfur hexafluoride <1 ppb H2O, CO2, and O2, as tested in argon using APIMS
Oxygenated gases: carbon dioxide, oxygen, nitrous oxide, clean dry air <10 ppb H2O

<1 ppb H2O, and CO2, as tested in argon using APIMS analyzer
Chlorinated gases: boron trichloride, chlorine, trichlorosilane, dichlorosilane <100 ppb H2O

<1 ppb H2O, and CO2, as tested in argon using APIMS analyzer
Halogenated gases: hydrogen chloride, hydrogen bromide < 15 ppb H2O as tested in hydrogen chloride using CRDS
< 50 ppb H2O as tested in hydrogen bromide using CRDS
< 1 ppb H2O as tested in argon using APIMS analyzer
Photolithography clean dry air < 1 ppb H2O as tested in argon using APIMS analyzer
< 300 ppt C4H8 as tested in argon using APIMS Analyzer
< 10 ppt SO2 as tested in nitrogen using ion chromatograph
< 15 ppt NH3 as tested in nitrogen using ion chromatograph
< 1 ppt HMDSO as tested in argon using APIMS analyzer and baseline subtraction

Unit conversion: 1 bar = 100 kilopascals
Performance

Pressure Drop vs. Gas Flow Rate

PG550 with 0.003 μm filter
PG550 with 0.003 μm filter

PG550 with 0.4 μm filter
PG550 with 0.4 μm filter

PG2400___VMM4 with 0.003 μm filter
PG2400___VMM4 with 0.003 μm filter

PG2400___VMM4 with 0.4 μm filter
PG2400___VMM4 with 0.4 μm filter

PG2400___VMM8 with 0.003 μm filter
PG2400___VMM8 with 0.003 μm filter

PG2400___VMM8 with 0.4 μm filter
PG2400___VMM8 with 0.4 μm filter

PG11000 Series assembly
PG11000 Series assembly

Note: For pressure drop information for a specific application, please contact Pall Microelectronics.

Lifetime Calculations

Pall AresKleenTM purification material: inert gas service
Gaskleen® PG550 purifier assembly, part # GLP9INPVMM4

Inlet pressure: 207 kPa (30 psig) contaminant challenge as H2O
Gaskleen® PG550 purifier assembly, part # GLP9INPVMM4

Pall AresKleenTM purification material: inert gas service
Gaskleen® PG11000 purifier assembly, part # GLP110INPVFM8

Inlet pressure: 207 kPa (30 psig) contaminant challenge as H2O
Gaskleen® PG11000 purifier assembly, part # GLP110INPVFM8

Pall AresKleenTM purification material: inert gas service
Gaskleen® PG2400 purifier assembly, part # GLP24INPVMM4/VMM8

Inlet pressure: 207 kPa (30 psig) contaminant challenge as H2O
Gaskleen® PG2400 purifier assembly, part # GLP24INPVMM4/VMM8
Type
Purifiers
Use
Gas Filtration, Purification
Additional Information

List of Purifiable Gases

Gas Family Material Effluent Specification2
Nitrogen, argon, helium, xenon, krypton, neon INP <1 ppb H2O, O2, CO2 and CO
Silane, hydrogen, methane, cyclopropane, propane, dimethyl ether SIP <1 ppb H2O, O2, CO2 and CO
Carbon monoxide SIP <1 ppb H2O, O2, CO2, Ni(CO4), and Fe(CO)5
Fluoromethane, difluoromethane, trifluorine, tetrafluoroethane, pentafluoroethane, heptafluoropropane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane FCP <1 ppb H2O, O2, CO2 and CO
Germane GEH4P <1 ppb H2O, O2, CO2 and CO
Sulfur hexafluoride SF6P <1 ppb H2O, O2, CO2 and CO
Air, carbon dioxide, oxygen, nitrous oxide OXP <10 ppb H2O
Boron trichloride, chlorine, trichlorosilane, dichlorosilane CLXP <100 ppb H2O
Hydrogen chloride HCLP <15 ppb H2O
Hydrogen bromide HBRP < 50 ppb H2O
Photolithography clean dry air CDAP < 1 ppb H2O,
< 300 ppt organics (as C4),
< 10 ppt acid gases (as SO2),
< 15 ppt basic gases (as NH3),
< 1 ppt refractory compounds (as HMDSO
2 As tested in inert gas.


Nominal Assembly Dimensions

Nominal Assembly Dimensions
Note: For manifold dimensions, please contact Pall Corporation.
Ordering Information
Series Part Number3 Description
PG550 GLP9xxxxFVMM4 Purifier assembly, 75 slpm, 0.003 μm filter, 14 in. gasket seal (VCR or compatible) male/male
GLP9xxxxFMAN Bypass manifold with GLP9xxxFVMM4 assembly
GLP9xxxxFVMM4GCMAN Gas cabinet manifold with GLP9xxxFVMM4 assembly
   
GLP9xxxxVMM4 Purifier assembly, 75 slpm, 0.4 μm filter, 14 in. gasket seal (VCR or compatible) male/male
GLP9xxxxMAN Bypass manifold with GLP9xxxVMM4 assembly
GLP9xxxxVMM4GCMAN Gas cabinet manifold with GLP9xxxVMM4 assembly
PG2400 GLP24xxxxFVMM4 Purifier assembly, 300 slpm, 0.003 μm filter, 14 in. gasket seal (VCR or compatible) male/male
GLP24xxxxFVMM8 Purifier assembly, 300 slpm, 0.003 μm filter, 12 in. gasket seal (VCR or compatible) male/male
GLP24xxxxFMAN Bypass manifold with GLP24xxxxFVMM8 assembly
   
GLP24xxxxVMM4 Purifier assembly, 500 slpm, 0.4 μm filter, 14 in. gasket seal (VCR or compatible) male/male
GLP24xxxxVMM8 Purifier assembly, 500 slpm, 0.4 μm filter, 12 in. gasket seal (VCR or compatible) male/male
GLP24xxxxMAN Bypass manifold with GLP24xxxxVMM8 assembly
PG11000 GLP110xxxxVFM84 Purifier assembly, 1,000 slpm, 0.4 μm filter, 12 in. gasket seal (VCR or compatible) female inlet/male outlet
GLP110xxxxMAN4 Bypass manifold with GLP110xxxVMM8 assembly
3 See list of purifiable gases on page 1. Example: GLP9INPFVMM4.
4 The PG11000 stainless steel assembly (used with all GLP110 part numbers) is fabricated in accordance with the ASME BPVC Section VIII, Division 1, and has a U-stamp. If the user determines that an L-stamp is required for a lethal service application, please contact Pall Microelectronics for cost and availability.
Application
Process gas purification, Process gas purification
Segment
Photovoltaics
Semiconductor