DFA Compact Capsule Filters for the Microelectronics Industry product photo Primary L

DFA Compact Capsule Filters for the Microelectronics Industry

The DFA filter assembly is a handy, easy-to-use and cost effective capsule filter designed for relatively low flow rates and small volume batch processes.

Flexibility in filter media and connector options allow for a wide range of general industry applications.

Features and Benefits

  • Wide variety of media materials (PTFE, nylon 6,6, hydrophilic PVDF, HDPE, polypropylene)
  • Broad range of connector options (Swagelok1, Pillarfitting2, NPT, flare style)
  • All-polymeric construction
  • O-ring free design
  • Allows for easy customization of filtration systems to accommodate various flow rates and removal rating requirements
  • Able to vent and drain quickly and easily
  • Low hold-up volume
1 Trademark of Swagelok Co.
2 Trademark of Nippon Pillar Packing Co., Ltd.


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Description

The DFA filter assembly is a handy, easy-to-use and cost effective capsule filter designed for relatively low flow rates and small volume batch processes.

Flexibility in filter media and connector options allow for a wide range of general industry applications.

Features and Benefits

  • Wide variety of media materials (PTFE, nylon 6,6, hydrophilic PVDF, HDPE, polypropylene)
  • Broad range of connector options (Swagelok1, Pillarfitting2, NPT, flare style)
  • All-polymeric construction
  • O-ring free design
  • Allows for easy customization of filtration systems to accommodate various flow rates and removal rating requirements
  • Able to vent and drain quickly and easily
  • Low hold-up volume
1 Trademark of Swagelok Co.
2 Trademark of Nippon Pillar Packing Co., Ltd.
Specifications
Emflon® Ultipor® N66 Ultipleat® P-Nylon Fluorodyne®
Materials Filter Medium PTFE (hydrophobic) Nylon 6,6 (hydrophilic) Nylon 6,6 (hydrophilic) PVDF (hydrophilic)
Other Components Polypropylene Polyester, Polypropylene HDPE, Polypropylene Polypropylene
Removal Ratings 0.05 μm, 0.1 μm, 0.2 μm, 0.45 μm 0.1 μm, 0.2 μm 10 nm, 20 nm, 40 nm, 0.15 μm 0.1 μm, 0.2 μm
Maximum operating temperature 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F
Maximum
operating pressure
( 38 °C / 100 °F )
Liquid 0.49 MPaG 0.49 MPaG 0.49 MPaG 0.49 MPaG
Gas 0.34 MPaG 0.34 MPaG 0.34 MPaG 0.34 MPaG
Maximum differential
pressure ( 38 °C / 100 °F )
0.34 MPa 0.34 MPa 0.34 MPa 0.34 MPa
Main applications Vent air
Process gas
Organic solvents
Photoresist
Developer
DI Water
Photoresist
Developer
DI Water
Ultrapure DI Water
Aqueous chemicals
Minimum order quantity 6 pcs 6 pcs 6 pcs 6 pcs


P Emflon® PE-Kleen HDC® II Profile® Star
Materials Filter Medium PTFE (hydrophobic) HDPE Polypropylene Polypropylene
Other Components HDPE, Polypropylene HDPE, Polypropylene Polypropylene Polypropylene
Removal Ratings 0.05 μm, 0.1 μm, 0.2 μm 5 nm3, 10 nm, 30 nm, 0.05 μm, 1 μm 0.6 μm, 1.2 μm, 2.5 μm, 4.5 μm, 6 μm, 10 μm, 20 μm, 40 μm, 70 μm 0.8 μm, 1 μm, 1.5 μm, 3 μm, 5 μm
Maximum operating temperature 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F
Maximum
operating pressure
( 38 °C / 100 °F )
Liquid 0.49 MPaG 0.49 MPaG 0.49 MPaG 0.49 MPaG
Gas 0.34 MPaG 0.34 MPaG 0.34 MPaG 0.34 MPaG
Maximum differential
pressure ( 38 °C / 100 °F )
0.34 MPa 0.34 MPa 0.34 MPa 0.34 MPa
Main applications Photoresist
Organic solvents
Chemicals
Photoresist
Organic solvents
Chemicals
Acids, bases
DI Water
Solvents
Suspensions
High viscosity fluids
Coatings
Minimum order quantity 6 pcs 6 pcs 6 pcs 6 pcs

3 5 nm is available for DFA1, DFA2 and DFA6402.
Performance

Typical Flow Charcteristics – 1 cP fluid, 20 ºC




Typical Flow Charcteristics – 1 cP fluid, 20 ºC




Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Type
Assemblies, Capsules
Use
Filtration
Ordering Information

Part Numbers / Ordering Information (DFA1, 2 Series)


DFA [1] [2] [3]

Table 1 : Configurations

 
1 for low flow rates
2 for medium flow rates
 

Table 2 : Options for filter media and removal ratings6

 
Emflon 8 Ultipor N66 Ultipleat P-Nylon Fluorodyne
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
FDE 8 0.05 μm NIEY 0.1 μm AN01E 10 nm V001EY 0.1 μm
FTE 8 0.1 μm NAEY 0.2 μm ANME 20 nm V002EY 0.2 μm
FRE 8 0.2 μm     ANDE 40 nm    
        AN15E 0.15 μm    
 

 
P Emflon 8 PE-Kleen 8 HDC II 7 Profile Star 7
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
UFDE 8 0.05 μm UG5E 8 5 nm J006 7 0.6 μm A008 7 0.8 μm
UFTE 8 0.1 μm UG001E 8 10 nm J012 7 1.2 μm A010 7 1 μm
UFRE 8 0.2 μm UG003E 8 30 nm J025 7 2.5 μm A015 7 1.5 μm
    UG005E 8 0.05 μm J045 7 4.5 μm A030 7 3 μm
    UG100E 8 1 μm J060 7 6 μm A050 7 5 μm
        J100 7 10 μm    
        J200 7 20 μm    
        J400 7 40 μm    
        J700 7 70 μm    
 

Table 3 : Connector options

 
  Code Inlet / Outlet Vent / Drain
Size Connections Size Connections
DFA1 SW44 1/4" Swagelok 1/4" Swagelok
DFA1 SW84M 8 mm Swagelok 4 mm Swagelok
DFA1 NP64 3/8" Pillarfitting 4 mm Pillarfitting
DFA1 NP64M 6 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP64MR4 6 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP84M 8 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP84MR4 8 mm Pillarfitting 4 mm Pillarfitting
DFA2 FL6 3/8" Flare style nil nil
DFA2 FL64 3/8" Flare style 1/4" Flare style
DFA2 NP64 3/8" Pillarfitting 1/4" Pillarfitting
DFA2 NP84M 8 mm Pillarfitting 4 mm Pillarfitting
DFA2 NP124M 12 mm Pillarfitting 4 mm Pillarfitting
DFA2 NP124MR4 12 mm Pillarfitting 4 mm Pillarfitting
DFA2 SW84 1/2" Swagelok 1/4" Swagelok
 

4 R option is for repeat order products without sleeves and nuts on inlet/outlet.
5 Contact Pall for other fitting options.
6 The E in the the part number stands for an electronic grade product.
7 Extra rinsing option (F) is available for HDC II and Profile Star filters.
8 S-grade option is treated to have very low initial extractables.
< notes > Part numbers in combination with all codes are not always available. Please contact Pall for part number availability.

Minimum order quantity and packaging unit 6 pcs


Representative example part numbers

DFA1FRESSW44
DFA1FTESNP64M
DFA1FTESNP84M
DFA1FDESNP64M
DFA1FDESNP84M
DFA1ANDENP64M
DFA2ANDEFL64
DFA2ANDENP64R
DFA1ANMENP64M
DFA2ANMENP64R
DFA1UNIENP64M
DFA1UNIENP84M
DFA2UNIEFL64
DFA1UNDENP64M
DFA1UNDNP84M
DFA2UNDEFL64
DFA2UNDENP64R
DFA2UNDENP84M
DFA2UNMENP84M
DFA2UNMENP64R
DFA2NUMEFL64
DFA1NAEYSW44
DFA1NIEYNP64M
DFA1NIEYNP84M
DFA1NIEYSW44
DFA1V001EYSW44
DFA2UG001EFL64


Part Numbers / Ordering Information (DFA3201, 4201, 5301, 6402 Series)


DFA [4] [5]

Table 4 : Connector options

 
Fittings
Code
Inlet / Outlet Vent / Drain
Size Connections Size Connections
3201 3/8" Hose 1/8" NPT male
4201 1/4" NPT male 1/8" NPT male
5301 6 mm Swagelok 4 mm Swagelok
6402 3/8" Swagelok 1/4" Swagelok
 

Table 5 : Options for filter media and removal ratings9

 
Emflon 11 Ultipor N66 Ultipleat P-Nylon Fluorodyne
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
FDE 11 0.05 μm NIEY 0.1 μm AN01E 10 nm V001EY 0.1 μm
FTE 11 0.1 μm NAEY 0.2 μm ANME 20 nm V002EY 0.2 μm
FRE 11 0.2 μm     ANDE 40 nm    
FXE 11 0.45 μm     AN15E 0.15 μm    
 

 
P Emflon 11 PE-Kleen 11 HDC II 10 Profile Star 10
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
Code Removal
ratings
UFDE 11 0.05 μm UG5E 11 5 nm J006 10 0.6 μm A008 10 0.8 μm
UFTE 11 0.1 μm UG001E 11 10 nm J012 10 1.2 μm A010 10 1 μm
UFRE 11 0.2 μm UG003E 11 30 nm J025 10 2.5 μm A015 10 1.5 μm
    UG005E 11 0.05 μm J045 10 4.5 μm A030 10 3 μm
    UG100E 11 1 μm J060 10 6 μm A050 10 5 μm
        J100 10 10 μm    
        J200 10 20 μm    
        J400 10 40 μm    
        J700 10 70 μm    
 

9 The E in the the part number stands for an electronic grade product.
10 Extra rinsing option (F) is available for HDC II and Profile Star.
11 S-grade option is treated to have very low initial extractable.
12 There will be an indication as P in for 4201J012, 4201J025 and DFA3201, however the performance is unchanged.
< notes > Part numbers in combination with all codes are not always available. Please contact Pall for the part number availability.

Minimum order quantity and packaging unit 6 pcs


Representative example part numbers

DFA4201FRES
DFA4201FTES
DFA6402FTES
DFA4201FDES
DFA6402FDE
DFA6402FDES
DFA6402ANDE
DFA6402ANME
DFA4201UNAE
DFA4201UNIE
DFA6402UNAE
DFA6402UNIE
DFA6402UNDE
DFA6402NAEY
DFA6402NIEY
DFA4201V002EY
DFA4201V001EY
DFA6402UG100E
DFA4201UG015E
DFA4201UG007E
DFA6402UG007E
DFA4201UG005E
DFA6402UG005E
DFA6402UG003E
Application
Chemicals, Lithography