UltiKleen™ G2 KC Assemblies product photo Primary L

UltiKleen™ G2 KC Assemblies

The Pall UltiKleen G2 KC assembly is a completely disposable filter unit. It has greatly improved flow characteristics over traditional assembly designs making it ideally suited for process chemical applications for 300 mm wafer fabrication processes. The laid-over pleat filter design increases the effective filter area to 2.2 m2 in a compact size. The result is longer service life as well as high flows. The built-in UltiKleen cartridge is acid cleaned prior to shipment to ensure low metal ion content. The UltiKleen G2 KC assembly provides excellent chemical and thermal resistance making it the preferred choice for most semiconductor chemical process applications.

The UltiKleen G2 KC assembly is an ideal upgrade filter for enhanced filter performance.

Features

  • Optimized laid-over pleat construction almost doubles filter area compared to standard pleat geometry
  • A disposable filter unit with the filter cartridge integrally sealed in the housing
  • Low extractables Me-KleenSM option available to ensure low metals content.
  • Sealed assembly improves safe handling and disposal of hazardous chemicals
  • Flow characteristics greatly improved, suitable for 300 mm processes
  • System design and retrofit made easy with T-flow, In-line and L-flow options
  • 100% integrity tested


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Description

The Pall UltiKleen G2 KC assembly is a completely disposable filter unit. It has greatly improved flow characteristics over traditional assembly designs making it ideally suited for process chemical applications for 300 mm wafer fabrication processes. The laid-over pleat filter design increases the effective filter area to 2.2 m2 in a compact size. The result is longer service life as well as high flows. The built-in UltiKleen cartridge is acid cleaned prior to shipment to ensure low metal ion content. The UltiKleen G2 KC assembly provides excellent chemical and thermal resistance making it the preferred choice for most semiconductor chemical process applications.

The UltiKleen G2 KC assembly is an ideal upgrade filter for enhanced filter performance.

Features

  • Optimized laid-over pleat construction almost doubles filter area compared to standard pleat geometry
  • A disposable filter unit with the filter cartridge integrally sealed in the housing
  • Low extractables Me-KleenSM option available to ensure low metals content.
  • Sealed assembly improves safe handling and disposal of hazardous chemicals
  • Flow characteristics greatly improved, suitable for 300 mm processes
  • System design and retrofit made easy with T-flow, In-line and L-flow options
  • 100% integrity tested

Specifications

Product Specifications

Materials of construction

 
Filter medium: PTFE
Media support: PTFE
Inner core: PFA
Outer cage: PFA
End caps: PFA
Housing: PFA
 

 
Product Name UCFD UCFT UCFR
Removal Ratings 0.05 μm 0.1 μm 0.2 μm
Configurations T- flow, In-line, L-flow
Nominal Filter Area 2.2 m2 / 23.7 ft2
Maximum Operating Temperature 170 ºC / 338 ºF
Maximum Operating Pressure 0.49 MPaG (71 psig) @ 25 ºC (77 ºF)
0.39 MPaG (57 psig) @ 60 ºC (140 ºF)
0.34 MPaG (49 psig) @ 90 ºC (194 ºF)
0.20 MPaG (29 psig) @ 120 ºC (248 ºF)
0.15 MPaG (22 psig) @ 150 ºC (302 ºF)
0.12 MPaG (17 psig) @ 170 ºC (338 ºF)
 

Dimensions

In-Line   L-Flow
In-Line   L-Flow
     
T-Flow   T-flow Downstream Venting
T-Flow   T-flow Downstream Venting

UltiKleen G2 KC Assembly (LDFG/LDFV)

 
In-Line Nominal Length
(L) (mm / in.)
T-style Nominal Length
(L) (mm / in.)
VT-style Nominal Length
(L) (mm / in.)
12E2 396.5 / 15.6 12E2 408/ 16.1 12E2 377 / 14.8
12E51 412 / 16.2 12E71 403 / 15.9 128E2 385 / 15.2
124E51 412 / 16.2 13E0 495 / 19.5 12E71/72 377 / 14.8
16E8 428 / 16.9 13E1 432 / 17 128E71/72 402 402 / 15.8
16E51 436 / 17.2 13E2 442 / 17.4 13E1 445 / 17.5
17E0 448 / 17.6 13E6 416 / 16.4 13E51 444 / 17.4
17E1 445 / 17.7 13E9 433 / 17.1 168E71/72 403 / 15.9
17E51 442 / 17.4 13E51 473 / 18.6    
17E71 462 / 18.2 13E71 444 / 17.5    
    L-style VL-style
    12E2 408 / 16.1 12E2 440 / 17.35
 

Performance

Pressure Drop vs. Liquid Flow Rate1

In-Line

In-Line

L-flow, T-flow Downstream Venting

L-flow, T-flow Downstream Venting
1 For liquids other than water, multiply differential pressure by fluid viscosity (cP).

Unit conversion: 1 bar = 0.1 MPa

Type

Filter Capsules

Ordering Information

Pall Part Number = LDF [1] [2] 1 UCF [3] L [4] E [5] [6]

Table 1

 
Code Downstream Venting
G N/A
V Available
 

Table 2

 
Code Flow
T T-flow
N In-line
L L-flow
 

Table 3

 
Code Removal Ratings (μm)
D 0.05
T 0.1
R 0.2
 

Table 42

 
Code Inlet/Outlet Vent/drain Memo
Head End Bowl End
12 3⁄4 in. male 1⁄2 in male 1⁄2 in male T-flow / L-flow
12 3⁄4 in. male 1⁄2 in male 1⁄2 in female Downstream venting-type
12 3⁄4 in. male 3⁄8 in male 3⁄8 in male In-line
124 3⁄4 in. male 1⁄4 in male 1⁄4 in male In-line
128 3⁄4 in. male 1⁄2 in male 1⁄2 in male Downstream venting-type
13 3⁄4 in. female 1⁄2 in female 1⁄2 in female T-flow
16 1 in. male 1⁄2 in male 1⁄2 in male T-flow
16 1 in. male 1⁄2 in male 1⁄2 in female Downstream venting-type
16 1 in. male 3⁄8 in male 3⁄8 in male In-line
164 1 in. male 1⁄4 in male 1⁄4 in male In-line
168 1 in. male 1⁄2 in male 1⁄2 in male Downstream venting-type
17 1 in. female 1⁄2 in female 1⁄2 in female In-line
 

Table 5

 
Code Connections
0 No connection
1 20 Series (Flowell)
2 Super Pillar Type (Nippon Pillar)3
51 Flare style
6 FinalLock4
71 Super Pillar 300 P Series (Nippon Pillar)
72 Super Pillar 300 P Series L Type (Nippon Pillar)
8 60 Series (Flowell)
9 11CR Series (Flowell)
 

Table 6

 
Code Prewet Option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 
2 Disposable capsules are not available with every option (Refer to codes for options).
3 Pillar is a trademark of Nippon Pillar Packing Co.
4 FinalLock is a trademark of Kurabo Industries Ltd.
5 Please contact Pall for the extractable conditions.

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