VaraClean VCSC Filters product photo Primary L

VaraClean VCSC Filters

The Varafine™ VaraClean filter provides a unique filtration solution for critical chemical cleaning applications.
  • Patented highly asymmetric polysulfone membrane has a wide range of chemical compatibilities
  • Superior flow rates give faster bath clean-up and reduced energy consumption
  • No particle release despite variations in process conditions
  • Efficient particle removal and absolute mechanical retention
  • Hydrophilic membrane, no need to prewet filter
  • No IPA contamination introduced to process chemicals
  • Reduced down time, DI water waste, and inconvenience
  • Fast rinse-up cartridges are factoryflushed with 18 Megohm–cm ultrapure water
  • Cleanroom manufactured


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Description
The Varafine™ VaraClean filter provides a unique filtration solution for critical chemical cleaning applications.
  • Patented highly asymmetric polysulfone membrane has a wide range of chemical compatibilities
  • Superior flow rates give faster bath clean-up and reduced energy consumption
  • No particle release despite variations in process conditions
  • Efficient particle removal and absolute mechanical retention
  • Hydrophilic membrane, no need to prewet filter
  • No IPA contamination introduced to process chemicals
  • Reduced down time, DI water waste, and inconvenience
  • Fast rinse-up cartridges are factoryflushed with 18 Megohm–cm ultrapure water
  • Cleanroom manufactured
Specifications

Materials of Construction

Medium Hydrophilic asymmetric polysulfone (single layer)
Hardware Polysulfone
Support fluoro-polymer – upstream and downstream
Sealing Thermal bond

Removal ratings 1.2 μm, 0.8 μm, 0.65 μm, 0.45 μm, 0.2 μm, 0.1 μm, 0.05 μm
Configurations
  • Nominal length:
    • 102 mm / 4 in.
    • 254 mm / 10 in.
    • 508 mm / 20 in.
    • 762 mm / 30 in.
    • 1016 mm / 40 in.
  • Diameter: 66 mm / 2.6 in.
Operating conditions Maximum forward differential pressure
  • 6.5 bar @ 20 °C / 90 psid @ 68 °F
  • 5.0 bar @ 60 °C / 72 psid @ 140 °F
Compatibility Compatible HF1, 2, BOE, TMAH and other commonly used cleans and etch bath chemicals at ambient temperatures.
1 Polysulfone is not compatible with many solvents and concentrated acids. Call for recommendations.
2 Consult Pall Microelectronics for specific recommendations.
Performance
Part Numbers Removal Rating in Microns (μm) Water Flow for 254 mm / 10 in. Element Clean Pressure Drop in Water for 254 mm / 10 in. Element
    lpm / 100 mbar gpm / psid mbar / lpm psid / gpm
VCSC050 0.05 8.2 1.5 12.2 0.67
VCSC100 0.1 9.3 1.7 10.7 0.59
VCSC200 0.2 16.4 3.0 6.0 0.33
VCSC450 0.45 30.0 5.5 3.3 0.18
VCSC650 0.65 32.7 6.0 3.1 0.17
VCSC800 0.8 38.2 7.0 2.5 0.14
VCSC1200 1.2 43.7 8.0 2.3 0.13
Type
Filter Cartridges
Ordering Information
This information is a guide to the part number structure and possible options. For availability of specific options and housing details, please contact Pall.

Example Part Number: VCSC100-10VM8 ( See bold references in tables below)

Part Number:
VCSC< Removal Rating Code from Table 1 > - < Cartridge Length Code from Table 2 > < End Configuration Code from Table 3 > < O-Ring Material Code from Table 4 >

Table 1 - Removal Rating

Code Removal ratings in microns (μm)
050 0.05
100 0.1
200 0.2
450 0.45
650 0.65
800 0.8
1200 1.2

Table 2 - Cartridge Lengths (nominal)

Code Cartridge lengths (nominal)
04 102 mm / 4 in.
10 254 mm / 10 in.
20 508 mm / 20 in.
30 762 mm / 30 in.
40 1016 mm / 40 in.

Table 3 - End Configurations

Code End configurations
M3 SOE flat closed end, external 222 O-rings
M6 SOE flat closed end, external 226 O-rings
M7 SOE fin end, external 226 O-rings
M8 SOE fin end, external 222 O-rings

Table 4 - O-Ring Materials

Code O-Ring materials
V Fluorocarbon elastomer
T FEP encapsulated silicone
F FEP encapsulated fluorocarbon elastomer (standard)
C Chemraz3
S Silicone
3 Chemraz is a trademark of Greene, Tweed & Co.


Unit conversion: 1 bar = 100 kilopascals
Application
Chemicals