UltiKleen™ G2 Excellar ER Filters and ER KC Assemblies product photo Primary L

UltiKleen™ G2 Excellar ER Filters and ER KC Assemblies

The enhanced retention (ER) and improved non-dewetting properties of the UltiKleen G2 Excellar ER filter has enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nm manufacturing node. Designed for critical single-pass point-of-use filtration, the filter's high flow rate makes it additionally suitable for recirculation bath applications.

The UltiKleen G2 Excellar ER filter media made using Pall's proprietary Molecular Surface Tailoring (MST) technology, imparts non-dewetting properties to the PTFE membrane without adding a chemical layer to the media surface. Inside the membrane, a hyperfine pore matrix provides significantly improved retention of particles down to 15 nanometers in size. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive high temperature cleaning chemistries including aqueous chemistries such as hot SPM, SC-1 and SC-2.

Features

  • Enhanced retention (ER) of particles
  • Robust non-dewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra high purity fluoro-polymer construction
  • Low extractables (Single digit ppb1 total in a 5% HCl extraction of 1.5 liters for 24 hours)
  • Provided prewet with Full-fill2 UPW package as standard
  • 100% integrity tested
1 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
2 Package is completely filled with ultrapure water.


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Description

The enhanced retention (ER) and improved non-dewetting properties of the UltiKleen G2 Excellar ER filter has enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nm manufacturing node. Designed for critical single-pass point-of-use filtration, the filter's high flow rate makes it additionally suitable for recirculation bath applications.

The UltiKleen G2 Excellar ER filter media made using Pall's proprietary Molecular Surface Tailoring (MST) technology, imparts non-dewetting properties to the PTFE membrane without adding a chemical layer to the media surface. Inside the membrane, a hyperfine pore matrix provides significantly improved retention of particles down to 15 nanometers in size. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive high temperature cleaning chemistries including aqueous chemistries such as hot SPM, SC-1 and SC-2.

Features

  • Enhanced retention (ER) of particles
  • Robust non-dewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra high purity fluoro-polymer construction
  • Low extractables (Single digit ppb1 total in a 5% HCl extraction of 1.5 liters for 24 hours)
  • Provided prewet with Full-fill2 UPW package as standard
  • 100% integrity tested
1 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
2 Package is completely filled with ultrapure water.

Specifications

Materials of Construction

 
Filter medium: Surface modified PTFE
Media support: PFA/PTFE
Inner core: PFA
Outer cage: PFA
End caps: PFA
Housing: PFA
O-ring options: FEP encapsulated fluoroelastomer, Kalrez3, and Chemraz4
 
3 Kalrez is a trademark of E.I. du Pont de Nemours and Company.
4 Chemraz is a trademark of Green, Tweed & Co.


 
Product Name UltiKleen G2 Excellar ER Filters UltiKleen G2 Excellar ER KC Assemblies
Removal Ratings 15 nm, 20 nm 15 nm, 20 nm
Configurations ABFG1 ABFG2 ABFG3 T-flow, In-line, L-flow (10 in.)
Filter Area 1.9 m2 / 20.5 ft2 3.8 m2 / 41.0 ft2 5.4 m2 / 61.5 ft2 1.9 m2 / 20.5 ft2
Maximum Operating Temperature 170 ºC / 338 ºF 170 ºC / 338 ºF
Maximum Operating Pressure 0.59 MPaG (85.6 psig) @ 50 ºC / 120 ºF 0.5 MPaG (73 psig) @ 25 ºC (77 ºF)
0.4 MPaG (58 psig) @ 60 ºC (140 ºF)
0.35 MPaG (51 psig) @ 90 ºC (194 ºF)
0.20 MPaG (29 psig) @ 120 ºC (248 ºF)
0.15 MPaG (22 psig) @ 150 ºC (302 ºF)
0.12 MPaG (17 psig) @ 170 ºC (338 ºF)
 

Dimensions(nominal)

In-Line   L-Flow
In-Line   L-Flow
     
T-Flow   T-Flow Downstream Vent
T-Flow   T-Flow Downstream Vent

Performance

Typical Flow Characteristics - 1cP fluid, 20℃

UltiKleen G2 Excellar ER Filters


In-line
UltiKleen G2 Excellar ER KC Assemblies - In-line

UltiKleen G2 Excellar ER KC Assemblies - T-flow, L-flow

UltiKleen G2 Excellar ER KC Assemblies - T-flow, L-flow

Type

Filter Capsules

Ordering Information

Ordering Information - UltiKleen G2 Excellar ER Filters


Pall Part Number = ABFG [1] GP[2] 3EH1 [3]

Table 1

 
Code Nominal length (mm/in.)
1 244/10
2 478/20
3 726/30
 

Table 2

 
Code Removal Rating
15 15 nm
20 20 nm
 

Table 3

 
Code Prewet option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 

Ordering Information - UltiKleen G2 Excellar ER KC Assemblies


Pall Part Number = LDF [1] [2] 1GPK [3] [4] E  [5] [6]

Table 1

 
Code Downstream venting
G N/A
V Available
 

Table 2

 
Code Flow
T T-flow
N In-line
L L-flow
 

Table 3

 
Code Removal Rating
15 15 nm
20 20 nm
 

Table 46

 
Code Inlet/outlet Vent/drain Memo
Head end Bowl end
12 34 in. male 12 in. male 12 in. male T-flow / L-flow
12 34 in. male 12 in. male 12 in. female Downstream venting-type
12 34 in. male 38 in. male 38 in. male In-line
124 34 in. male 14 in. male 14 in. male In-line
128 34 in. male 12 in. male 12 in. male Downstream venting-type
13 34 in. female 12 in. female 12 in. female T-flow
16 1 in. male 12 in. male 12 in. male T-flow
16 1 in. male 12 in. male 12 in. female Downstream venting-type
16 1 in. male 38 in. male 38 in. male In-line
164 1 in. male 14 in. male 14 in. male In-line
168 1 in. male 12 in. male 12 in. male Downstream venting-type
17 1 in. female 12 in. female 12 in. female In-line
 

Table 5

 
Code Connections
0 No connection
1 20 Series (Flowell)
2 Super Pillar Type (Nippon Pillar)7
51 Flare style
6 FinalLock8
71 Super Pillar 300 P Series (Nippon Pillar)
72 Super Pillar 300 P Series L Type (Nippon Pillar)
8 60 Series (Flowell)
9 11CR Series (Flowell)
 

Table 6

 
Code Prewet option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 
5 Please contact Pall for the extractable conditions.
6 Part numbers in combination with all codes are not always available. Please contact Pall for the part number availability.
7 Pillar is a trademark of Nippon Pillar Packing Co.
8 FinalLock is a trademark of Kurabo Industries Ltd.

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