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VaraClean VCSC Filters

The Varafine™ VaraClean filter provides a unique filtration solution for critical chemical cleaning applications.
  • Patented highly asymmetric polysulfone membrane has a wide range of chemical compatibilities
  • Superior flow rates give faster bath clean-up and reduced energy consumption
  • No particle release despite variations in process conditions
  • Efficient particle removal and absolute mechanical retention
  • Hydrophilic membrane, no need to prewet filter
  • No IPA contamination introduced to process chemicals
  • Reduced down time, DI water waste, and inconvenience
  • Fast rinse-up cartridges are factoryflushed with 18 Megohm–cm ultrapure water
  • Cleanroom manufactured
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Datasheets

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The Varafine™ VaraClean filter provides a unique filtration solution for critical chemical cleaning applications.
  • Patented highly asymmetric polysulfone membrane has a wide range of chemical compatibilities
  • Superior flow rates give faster bath clean-up and reduced energy consumption
  • No particle release despite variations in process conditions
  • Efficient particle removal and absolute mechanical retention
  • Hydrophilic membrane, no need to prewet filter
  • No IPA contamination introduced to process chemicals
  • Reduced down time, DI water waste, and inconvenience
  • Fast rinse-up cartridges are factoryflushed with 18 Megohm–cm ultrapure water
  • Cleanroom manufactured

Materials of Construction

Medium Hydrophilic asymmetric polysulfone (single layer)
Hardware Polysulfone
Support Polypropylene
Sealing Thermal bond

Removal ratings 0.05 μm, 0.1 μm
Nominal length 102 mm / 4 in., 254 mm / 10 in.
Diameter Diameter 66 mm / 2.6 in
Maximum forward differential pressure 6.5 bar @ 20 °C / 90 psid @ 68 °F
5.0 bar @ 60 °C / 72 psid @ 140 °F
Compatibility Compatible HF1, 2, BOE, TMAH and other commonly used cleans and etch bath chemicals at ambient temperatures.
1 Polysulfone is not compatible with many solvents and concentrated acids. Call for recommendations.
2 Consult Pall Microelectronics for specific recommendations.
Part Numbers Removal Rating in Microns (μm) Water Flow for 254 mm / 10 in. Element Clean Pressure Drop in Water for 254 mm / 10 in. Element
    lpm / 100 mbar gpm / psid mbar / lpm psid / gpm
VCSC050 0.05 8.2 1.5 12.2 0.67
VCSC100 0.1 9.3 1.7 10.7 0.59
Filter Cartridges
Part Numbers Removal Ratings (μm) Cartridge Length O-Ring Material
VCSC050P04M3F 0.05 4 in. / 102 mm FEP encapsulated fluorocarbon
VCSC050P10M3F 0.05 10 in. / 254 mm FEP encapsulated fluorocarbon
VCSC100P04M3F 0.1 4 in. / 102 mm FEP encapsulated fluorocarbon
VCSC100P10M3T 0.1 10 in. / 254 mm FEP encapsulated silicone
Unit conversion: 1 bar = 100 kilopascals

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