Home/
Microelectronics/
Semiconductor/
Chemicals/
DFA Compact Capsule Filters for the Microelectronics Industry

Product image is a representative example for illustration purposes; actual image may vary

DFA Compact Capsule Filters for the Microelectronics Industry

DFA Compact Capsule Filters for the Microelectronics Industry

Need Help? Contact Us

* Required

Documents

Datasheets

Download: English | Japanese

Description

The DFA filter assembly is a handy, easy-to-use and cost effective capsule filter designed for relatively low flow rates and small volume batch processes.

Flexibility in filter media and connector options allow for a wide range of general industry applications.

Features and Benefits

Wide variety of media materials (PTFE, nylon 6,6, hydrophilic PVDF, HDPE, polypropylene)
Broad range of connector options (Swagelok¹, Pillarfitting², NPT, flare style)
All-polymeric construction
O-ring free design
Allows for easy customization of filtration systems to accommodate various flow rates and removal rating requirements
Able to vent and drain quickly and easily
Low hold-up volume

¹ Trademark of Swagelok Co.
² Trademark of Nippon Pillar Packing Co., Ltd.

Specifications


		Emflon®	Ultipor® N66	Ultipleat® P-Nylon	Fluorodyne®
Materials	Filter Medium	PTFE (hydrophobic)	Nylon 6,6 (hydrophilic)	Nylon 6,6 (hydrophilic)	PVDF (hydrophilic)
Materials	Other Components	Polypropylene	Polyester, Polypropylene	HDPE, Polypropylene	Polypropylene
Removal Ratings		0.05 μm, 0.1 μm, 0.2 μm, 0.45 μm, 1 μm	0.1 μm, 0.2 μm	10 nm, 20 nm, 40 nm, 0.15 μm	0.1 μm, 0.2 μm
Maximum operating temperature		38 ˚C / 100 ˚F	38 ˚C / 100 ˚F	38 ˚C / 100 ˚F	38 ˚C / 100 ˚F
Maximum operating pressure ( 38 °C / 100 °F )	Liquid	0.49 MPaG	0.49 MPaG	0.49 MPaG	0.49 MPaG
Maximum operating pressure ( 38 °C / 100 °F )	Gas	0.34 MPaG	0.34 MPaG	0.34 MPaG	0.34 MPaG
Maximum differential pressure ( 38 °C / 100 °F )		0.34 MPa	0.34 MPa	0.34 MPa	0.34 MPa
Main applications		Vent air Process gas Organic solvents	Photoresist Developer DI Water	Photoresist Developer DI Water	Ultrapure DI Water Aqueous chemicals
Minimum order quantity		6 pcs	6 pcs	6 pcs	6 pcs


		P Emflon®	PE-Kleen	HDC® II	Profile® Star
Materials	Filter Medium	PTFE (hydrophobic)	HDPE	Polypropylene	Polypropylene
Materials	Other Components	HDPE, Polypropylene	HDPE, Polypropylene	Polypropylene	Polypropylene
Removal Ratings		0.05 μm, 0.1 μm, 0.2 μm	5 nm³, 10 nm, 30 nm, 0.05 μm, 1 μm	0.6 μm, 1.2 μm, 2.5 μm, 4.5 μm, 6 μm, 10 μm, 20 μm, 40 μm, 70 μm	0.8 μm, 1 μm, 1.5 μm, 3 μm, 5 μm
Maximum operating temperature		38 ˚C / 100 ˚F	38 ˚C / 100 ˚F	38 ˚C / 100 ˚F	38 ˚C / 100 ˚F
Maximum operating pressure ( 38 °C / 100 °F )	Liquid	0.49 MPaG	0.49 MPaG	0.49 MPaG	0.49 MPaG
Maximum operating pressure ( 38 °C / 100 °F )	Gas	0.34 MPaG	0.34 MPaG	0.34 MPaG	0.34 MPaG
Maximum differential pressure ( 38 °C / 100 °F )		0.34 MPa	0.34 MPa	0.34 MPa	0.34 MPa
Main applications		Photoresist Organic solvents Chemicals	Photoresist Organic solvents Chemicals	Acids, bases DI Water Solvents	Suspensions High viscosity fluids Coatings
Minimum order quantity		6 pcs	6 pcs	6 pcs	6 pcs

³ 5 nm is available for DFA1, DFA2 and DFA6402.

Performance

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Type

Filter Capsules

Additional Information

Dimensions

Ordering Information

Part Numbers / Ordering Information (DFA1, 2 Series)

DFA [1] [2] [3]

Table 1 : Configurations


1	for low flow rates
2	for medium flow rates

Table 2 : Options for filter media and removal ratings⁶


Emflon ⁸		Ultipor N₆₆		Ultipleat P-Nylon		Fluorodyne
Code	Removal ratings	Code	Removal ratings	Code	Removal ratings	Code	Removal ratings
FDE ⁸	0.05 μm	NIEY	0.1 μm	AN01E	10 nm	V001EY	0.1 μm
FTE ⁸	0.1 μm	NAEY	0.2 μm	ANME	20 nm	V002EY	0.2 μm
FRE ⁸	0.2 μm			ANDE	40 nm
				AN15E	0.15 μm


P Emflon ⁸		PE-Kleen ⁸		HDC II ⁷		Profile Star ⁷
Code	Removal ratings	Code	Removal ratings	Code	Removal ratings	Code	Removal ratings
UFDE ⁸	0.05 μm	UG5E ⁸	5 nm	J006 ⁷	0.6 μm	A008 ⁷	0.8 μm
UFTE ⁸	0.1 μm	UG001E ⁸	10 nm	J012 ⁷	1.2 μm	A010 ⁷	1 μm
UFRE ⁸	0.2 μm	UG003E ⁸	30 nm	J025 ⁷	2.5 μm	A015 ⁷	1.5 μm
		UG005E ⁸	0.05 μm	J045 ⁷	4.5 μm	A030 ⁷	3 μm
		UG100E ⁸	1 μm	J060 ⁷	6 μm	A050 ⁷	5 μm
				J100 ⁷	10 μm
				J200 ⁷	20 μm
				J400 ⁷	40 μm
				J700 ⁷	70 μm

Table 3 : Connector options


	Code	Inlet / Outlet		Vent / Drain
	Code	Size	Connections	Size	Connections
DFA1	SW44	1/4"	Swagelok	1/4"	Swagelok
DFA1	SW84M	8 mm	Swagelok	4 mm	Swagelok
DFA1	NP64	3/8"	Pillarfitting	4 mm	Pillarfitting
DFA1	NP64M	6 mm	Pillarfitting	4 mm	Pillarfitting
DFA1	NP64MR⁴	6 mm	Pillarfitting	4 mm	Pillarfitting
DFA1	NP84M	8 mm	Pillarfitting	4 mm	Pillarfitting
DFA1	NP84MR⁴	8 mm	Pillarfitting	4 mm	Pillarfitting
DFA2	FL6	3/8"	Flare style	nil	nil
DFA2	FL64	3/8"	Flare style	1/4"	Flare style
DFA2	NP64	3/8"	Pillarfitting	1/4"	Pillarfitting
DFA2	NP84M	8 mm	Pillarfitting	4 mm	Pillarfitting
DFA2	NP124M	12 mm	Pillarfitting	4 mm	Pillarfitting
DFA2	NP124MR⁴	12 mm	Pillarfitting	4 mm	Pillarfitting
DFA2	SW84	1/2"	Swagelok	1/4"	Swagelok

⁴ R option is for repeat order products without sleeves and nuts on inlet/outlet.
⁵ Contact Pall for other fitting options.
⁶ The E in the the part number stands for an electronic grade product.
⁷ Extra rinsing option (F) is available for HDC II and Profile Star filters.
⁸ S-grade option is treated to have very low initial extractables.
< notes > Part numbers in combination with all codes are not always available. Please contact Pall for part number availability.

Minimum order quantity and packaging unit 6 pcs

Representative example part numbers

DFA1FRESSW44
DFA1FTESNP64M
DFA1FTESNP84M
DFA1FDESNP64M
DFA1FDESNP84M
DFA1ANDENP64M
DFA2ANDEFL64
DFA2ANDENP64R
DFA1ANMENP64M
DFA2ANMENP64R

DFA1UNIENP64M
DFA1UNIENP84M
DFA2UNIEFL64
DFA1UNDENP64M
DFA1UNDNP84M
DFA2UNDEFL64
DFA2UNDENP64R
DFA2UNDENP84M
DFA2UNMENP84M
DFA2UNMENP64R
DFA2NUMEFL64

DFA1NAEYSW44
DFA1NIEYNP64M
DFA1NIEYNP84M
DFA1NIEYSW44
DFA1V001EYSW44
DFA2UG001EFL64

Part Numbers / Ordering Information (DFA3201, 4201, 5301, 6402 Series)

DFA [4] [5]

Table 4 : Connector options


Fittings Code	Inlet / Outlet		Vent / Drain
Fittings Code	Size	Connections	Size	Connections
3201	3/8"	Hose	1/8"	NPT male
4201	1/4"	NPT male	1/8"	NPT male
5301	6 mm	Swagelok	4 mm	Swagelok
6402	3/8"	Swagelok	1/4"	Swagelok

Table 5 : Options for filter media and removal ratings⁹


Emflon ¹¹		Ultipor N₆₆		Ultipleat P-Nylon		Fluorodyne
Code	Removal ratings	Code	Removal ratings	Code	Removal ratings	Code	Removal ratings
FDE ¹¹	0.05 μm	NIEY	0.1 μm	AN01E	10 nm	V001EY	0.1 μm
FTE ¹¹	0.1 μm	NAEY	0.2 μm	ANME	20 nm	V002EY	0.2 μm
FRE ¹¹	0.2 μm			ANDE	40 nm
FXE ¹¹	0.45 μm			AN15E	0.15 μm
FNE ¹¹	1 μm


P Emflon ¹¹		PE-Kleen ¹¹		HDC II ¹⁰		Profile Star ¹⁰
Code	Removal ratings	Code	Removal ratings	Code	Removal ratings	Code	Removal ratings
UFDE ¹¹	0.05 μm	UG5E ¹¹	5 nm	J006 ¹⁰	0.6 μm	A008 ¹⁰	0.8 μm
UFTE ¹¹	0.1 μm	UG001E ¹¹	10 nm	J012 ¹⁰	1.2 μm	A010 ¹⁰	1 μm
UFRE ¹¹	0.2 μm	UG003E ¹¹	30 nm	J025 ¹⁰	2.5 μm	A015 ¹⁰	1.5 μm
		UG005E ¹¹	0.05 μm	J045 ¹⁰	4.5 μm	A030 ¹⁰	3 μm
		UG100E ¹¹	1 μm	J060 ¹⁰	6 μm	A050 ¹⁰	5 μm
				J100 ¹⁰	10 μm
				J200 ¹⁰	20 μm
				J400 ¹⁰	40 μm
				J700 ¹⁰	70 μm

⁹ The E in the the part number stands for an electronic grade product.
¹⁰ Extra rinsing option (F) is available for HDC II and Profile Star.
¹¹ S-grade option is treated to have very low initial extractable.
¹² There will be an indication as P in for 4201J012, 4201J025 and DFA3201, however the performance is unchanged.
< notes > Part numbers in combination with all codes are not always available. Please contact Pall for the part number availability.

Minimum order quantity and packaging unit 6 pcs

Caution: For optimal filtration performance, it is recommended to replace your filters at-least once a year. Annual replacements will reduce the potential of any leakages that may result due to prolonged chemical exposure. Pall warrants its filters for a period of 1 year from the date of shipment.

Representative example part numbers

DFA4201FRES
DFA4201FTES
DFA6402FTES
DFA4201FDES
DFA6402FDE
DFA6402FDES
DFA6402ANDE
DFA6402ANME

DFA4201UNAE
DFA4201UNIE
DFA6402UNAE
DFA6402UNIE
DFA6402UNDE

DFA6402NAEY
DFA6402NIEY
DFA4201V002EY
DFA4201V001EY
DFA6402UG100E
DFA4201UG015E
DFA4201UG007E
DFA6402UG007E
DFA4201UG005E
DFA6402UG005E
DFA6402UG003E

Reviews

We appreciate your review of this product. Please login to your account to leave a review.

DFA Compact Capsule Filters for the Microelectronics Industry

Features and Benefits

¹ Trademark of Swagelok Co.
² Trademark of Nippon Pillar Packing Co., Ltd.

Datasheets

Features and Benefits

¹ Trademark of Swagelok Co.
² Trademark of Nippon Pillar Packing Co., Ltd.

³ 5 nm is available for DFA1, DFA2 and DFA6402.

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Dimensions

Part Numbers / Ordering Information (DFA1, 2 Series)

Table 1 : Configurations

Table 2 : Options for filter media and removal ratings⁶

Table 3 : Connector options

Minimum order quantity and packaging unit 6 pcs

Part Numbers / Ordering Information (DFA3201, 4201, 5301, 6402 Series)

Table 4 : Connector options

Table 5 : Options for filter media and removal ratings⁹

Minimum order quantity and packaging unit 6 pcs

Ready to submit your quote now?

Want to continue browsing and submit later?

DFA Compact Capsule Filters for the Microelectronics Industry

Features and Benefits

1 Trademark of Swagelok Co. 2 Trademark of Nippon Pillar Packing Co., Ltd.

Datasheets

Features and Benefits

1 Trademark of Swagelok Co. 2 Trademark of Nippon Pillar Packing Co., Ltd.

3 5 nm is available for DFA1, DFA2 and DFA6402.

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Typical Flow Charcteristics – 1 cP fluid, 20 ºC

Dimensions

Part Numbers / Ordering Information (DFA1, 2 Series)

Table 1 : Configurations

Table 2 : Options for filter media and removal ratings6

Table 3 : Connector options

Minimum order quantity and packaging unit 6 pcs

Part Numbers / Ordering Information (DFA3201, 4201, 5301, 6402 Series)

Table 4 : Connector options

Table 5 : Options for filter media and removal ratings9

Minimum order quantity and packaging unit 6 pcs

Ready to submit your quote now?

Want to continue browsing and submit later?

¹ Trademark of Swagelok Co.
² Trademark of Nippon Pillar Packing Co., Ltd.

¹ Trademark of Swagelok Co.
² Trademark of Nippon Pillar Packing Co., Ltd.

³ 5 nm is available for DFA1, DFA2 and DFA6402.

Table 2 : Options for filter media and removal ratings⁶

Table 5 : Options for filter media and removal ratings⁹