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EZ In-Line Filter Assembly

The EZ In-line compact capsule assembly is ideally suited for filtering a broad range of liquids from photoresists, including pigmented color resists, to various slurries such as CMP and ceramic. Other applications include color inks, photoemulsions, magnetic coatings, and conductive and glass pastes. It is the largest capsule in the EZ series of assemblies offering quick, one-step filter replacements. Manifold connections are designed for easy removal of nozzles for cleaning.
  • Allows for quick and safe filter changeouts, and easy maintenance.
  • In-line flow design minimizes dead space
  • Capsule design prevents incorrect orientation and installation
  • Connection nozzles designed for simple change-out and easy maintenance
  • Ease of use sharply reduces down-time
  • Minimizes operator exposure to solvents
  • Profile Star depth filter media is especially suited for the removal of gels, aggregates and oversize particles
  • Available in nominal 130 mm (5 in.) and 260 mm (10 in.) length cartridges suitable for most applications
  • Broad choice of connection sizes
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Description

The EZ In-line compact capsule assembly is ideally suited for filtering a broad range of liquids from photoresists, including pigmented color resists, to various slurries such as CMP and ceramic. Other applications include color inks, photoemulsions, magnetic coatings, and conductive and glass pastes. It is the largest capsule in the EZ series of assemblies offering quick, one-step filter replacements. Manifold connections are designed for easy removal of nozzles for cleaning.
  • Allows for quick and safe filter changeouts, and easy maintenance.
  • In-line flow design minimizes dead space
  • Capsule design prevents incorrect orientation and installation
  • Connection nozzles designed for simple change-out and easy maintenance
  • Ease of use sharply reduces down-time
  • Minimizes operator exposure to solvents
  • Profile Star depth filter media is especially suited for the removal of gels, aggregates and oversize particles
  • Available in nominal 130 mm (5 in.) and 260 mm (10 in.) length cartridges suitable for most applications
  • Broad choice of connection sizes

Specifications

Materials

  • Filter Capsule
    • Filter medium: Polypropylene
    • Core, cage, end caps, support, drainage and housing: Polypropylene
    • End seal/side seal: Heat sealed
    • O-ring options: EPDM, Perfluoro elastomer
  • Head Manifold
    • Frame: FEP coated SUS 304
    • Connections (removal nozzles): PTFE

Removal Ratings

  • 1.5 μm, 3.5 μm, 5 μm

Operating Conditions

  • Maximum Operating Temperature: 30 °C
  • Maximum Operating Pressure: 0.19 MPa @ 30 °C

Connections

  • Inlet/Outlet:
    • 10 mm Swagelok1 compatible
    • 8 mm Swagelok compatible
    • 3⁄4 in. Swagelok compatible
    • 3⁄8 in. Swagelok compatible
  • Vent/Drain:
    • 8 mm Swagelok compatible
    • 6 mm Swagelok compatible
    • 1⁄4 in. Swagelok compatible
1 Swagelok is a trademark of Swagelok Co.

Performance

Pressure Drop vs. Liquid Flow Rate2

Pressure Drop vs. Liquid Flow Rate
2 For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Dimensions3


3 Filter capsule and head manifold are available in two sizes:

220 mm length capsule contains nominal 130 mm/5 in. cartridge, and 343 mm length capsule contains nominal 260 mm/10 in. cartridge.

337 mm length head manifold is designed for nominal 130 mm/5 in. cartridge and 460 mm length head manifold is for nominal 260 mm/10 in. cartridge.

Type

Filter Capsules

Ordering Information

Part Numbers / Ordering Information

Filter Casule

TEY[1][2][3]

Table 1
 
Code Cartridge Size
05 5 inch
1 10 inch
 

Table 2
 
Code Filter Media Removal Ratings (μm)
A015 Profile Star 1.5
A030 3.0
A050 5.0
 

Table 3
 
Code O-ring
J EPDM (Standard)
H23 Perfluoro elastomer
 

Head Manifold

TEH [1] SF2

Connections4 (Inlet/Outlet)

F - TE - [4] - SET

Table 4
 
Code Inlet/Outlet
SW10M 10 mm Swagelok Compatible
SW8M 8 mm Swagelok Compatible
SW12 3/4" Swagelok Compatible
SW6 3/8" Swagelok Compatible
 
4 Connections are not installed on the manifold. They need to be ordered separately.
   One set of connections contain two pairs of nozzles: for inlet /outlet and for vent /drain.

Connections (Vent/Drain)

F-TEV- [5] -SET

Table 5
 
Code Vent/Drain
SW8M 8 mm Swagelok Compatible
SW6M 6 mm Swagelok Compatible
SW4 1/4" Swagelok Compatible
 
Please contact Pall if you need plastic nuts

Specifications and availability: The information provided in this literature was reviewed for accuracy at the time of publication.

Product availability may be subject to change without notice.
For current information, consult your local Pall office or distributor.

Dummy Capsule (empty capsule for flushing)

 
Part Number Size
TEY05000J 5 inch
TEY1000J 10 inch
 

Representative example part numbers

Filter Capsule

TEY05A015J
TEY05A030J
TEY05A050J
TEY05A015H23
TEY05A030H23
TEY05A050H23
TEY1A015J
TEY1A030J
TEY1A050J
TEY1A015H23
TEY1A030H23
TEY1A050H23		    

Dummy Capsule
(Empty capsule for flushing)

TEY05000J
TEY1000J

Head Manifold

TEH05SF2
TEH1SF2		    

Connections

F-TE-SW10M-SET
F-TE-SW8M-SET
F-TE-SW12-SET
F-TE-SW6-SET
F-TEV-SW8M-SET
F-TEV-SW6M-SET
F-TEV-SW4-SET

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