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CMP StarKleen™ Filter Capsule product photo Primary L

CMP StarKleen™ Filter Capsule

CMP StarKleen filter capsules are designed for the filtration of oxide and metal (including copper) slurries on or near tools used in chemical mechanical polishing (CMP).
  • Compact, completely disposable, all polypropylene filter capsule with Flare style connections for easy changeout. Vents and drains are available with either NPT or Flare style fittings.
  • The capsules contain either depth or pleated style Profile® filters. The relatively deep, wide pleats of the Profile Star filters easily handle fluids containing high suspended solids. This design results in low differential pressures, which minimize shear and provide long service life.
  • The unique construction of these depth filters provides for built-in prefiltration assuring long service life with no breakthrough of contaminants nor shedding of filter medium.
  • Profile depth filters provide a sharp boundary between transmission of native slurry particles and removal of gels and aggregates.
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Datasheets

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CMP StarKleen filter capsules are designed for the filtration of oxide and metal (including copper) slurries on or near tools used in chemical mechanical polishing (CMP).
  • Compact, completely disposable, all polypropylene filter capsule with Flare style connections for easy changeout. Vents and drains are available with either NPT or Flare style fittings.
  • The capsules contain either depth or pleated style Profile® filters. The relatively deep, wide pleats of the Profile Star filters easily handle fluids containing high suspended solids. This design results in low differential pressures, which minimize shear and provide long service life.
  • The unique construction of these depth filters provides for built-in prefiltration assuring long service life with no breakthrough of contaminants nor shedding of filter medium.
  • Profile depth filters provide a sharp boundary between transmission of native slurry particles and removal of gels and aggregates.
Materials Medium: Polypropylene
Core, cage: Polypropylene
Shell: Polypropylene
Removal Rating 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 1.5 μm, 3 μm, 5 μm
Operating Conditions1 Maximum operating pressure at ambient temperature: 0.5 MPa @ 25 °C / 73 psig @ 77 °F
Maximum operating pressure at maximum temperature: 0.2 MPa @ 40 °C / 30 psig @ 104 °F
Maximum differential pressure: 0.3 MPa @ 25 °C / 45 psid @ 77 °F
Connections Inlet / outlet: 1 ⁄ 4" NPT, 1 ⁄ 4" Flare style, 3 ⁄ 8" Flare style
Vent / drain: 1 ⁄ 8" NPT, 1 ⁄ 4" Flare style
1 In compatible fluids which do not soften, swell, or adversely affect the filter performance or materials of construction.

Typical Flow Characteristics – 1 cP fluid, 20 ºC

Pressure Drop vs. Liquid Flow Rate
Filter Capsules
Part Number Filter Media Removal Rating (μm) Connections Inlet, outlet / Vent, drain
DFA1Y002FL4N2 Profile 0.2 1/4" Flare style / 1/8" NPT
DFA2Y002F64 0.2 3/8" Flare style / 1/4" Flare style
DFA4201Y002 0.2 1/4" NPT / 1/8" NPT
DFA1Y003FL4N2 Profile 0.3 1/4" Flare style / 1/8" NPT
DFA2Y003F64 0.3 3/8" Flare style / 1/4" Flare style
DFA2Y003F6N4 0.3 1/4" NPT / 1/8" NPT
DFA2Y010F64 Profile 1 3/8" Flare style / 1/4" Flare style
DFA4201Y010 1 1/4" NPT / 1/8" NPT
DFA1A010FL4N2 Profile Star 1 1/4" Flare style / 1/8" NPT
DFA2A010F64 1 3/8" Flare style / 1/4" Flare style
DFA4201A010 1 1/4" NPT / 1/8" NPT
DFA1A015FL4N2 Profile Star 1.5 1/4" Flare style / 1/8" NPT
DFA2A015F64 1.5 3/8" Flare style / 1/4" Flare style
DFA4201A015 1.5 1/4" NPT / 1/8" NPT
DFA1A030FL4N2 Profile Star 3 1/4" Flare style / 1/8" NPT
DFA2A030F64 3 3/8" Flare style / 1/4" Flare style
DFA4201A030 3 1/4" NPT / 1/8" NPT
DFA1A050FL4N2 Profile Star 5 1/4" Flare style / 1/8" NPT
DFA2A050F64 5 3/8" Flare style / 1/4" Flare style
DFA4201A050 5 1/4" NPT / 1/8" NPT

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