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Profile® III Filter (50 nm) for Advanced CMP Applications

The Profile® III 50 nm Filter has been developed to classify CMP slurries used in today’s most advanced technologies. Pall’s latest advancements in its melt-blowing processes have been utilized to produce extremely fine fibers that make it possible to remove large particles in slurries with mean particle size as low 30 nm, while being able to maintain an extremely low pressure drop across the filter.

These technology advancements make the Profile III, the filter of choice for next generation ceria and silica slurries.

Features & Benefits

  • Multi-zone pore construction optimizes both retention and filter service life
  • Each zone is manufactured to a target specification ensuring consistent, reproducible performance

Materials of Construction

Components Materials
Filter media Polypropylene
Core, Cage, End caps Polypropylene
O-ring Ethylene Propylene (EPR)
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Description

The Profile® III 50 nm Filter has been developed to classify CMP slurries used in today’s most advanced technologies. Pall’s latest advancements in its melt-blowing processes have been utilized to produce extremely fine fibers that make it possible to remove large particles in slurries with mean particle size as low 30 nm, while being able to maintain an extremely low pressure drop across the filter.

These technology advancements make the Profile III, the filter of choice for next generation ceria and silica slurries.

Features & Benefits

  • Multi-zone pore construction optimizes both retention and filter service life
  • Each zone is manufactured to a target specification ensuring consistent, reproducible performance

Materials of Construction

Components Materials
Filter media Polypropylene
Core, Cage, End caps Polypropylene
O-ring Ethylene Propylene (EPR)

Specifications

Configurations Code 25 Code 7
Nominal Length AB04 : 118 mm / 4.6 in AB04 : 165 mm / 6.5 in
AB1 : 276 mm / 10.9 in AB1 : 320 mm / 12.6 in
AB2 : 524 mm / 20.6 in AB2 : 569 mm / 22.4 in
AB3 : 777 mm / 30.6 in AB3 : 817 mm / 32.2 in
AB4 : 1,032 mm / 40.6 in AB4 : 1,066 mm / 42.0 in
Nominal Diameter 70 mm / 2.75 in
Removal Ratings 50 nm
Maximum Operating Temperature 82 °C / 180 °
Maximum Forward Differential Pressure 0.41 MPa @ 30 °C / 60 psid @ 85 °F
0.34 MPa @ 50 °C / 50 psid @ 122 °F
0.2 MPa @ 70 °C / 30 psid @ 158 °F
0.1 MPa @ 82 °C / 15 psid @ 180 °F

Performance

Typical Flow Characteristics – 1 cP fluid, 20 ℃

Type

Filter Cartridges

Use

Filtration

Ordering Information

AB [1] W0005 [2] J

Table 1

Code Cartridge Nominal Length
04 4”
1 10”
2 20”
3 30”
4 40”

Table 2

Code O-ring Size / End Caps
25 222 double O-ring flat end
7 226 double O-ring bomb fin

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