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CMP Profile® II Filter Capsules product photo Primary L

CMP Profile® II Filter Capsules

CMP Profile II Filter Capsules are designed for the filtration of both oxide and metal slurries at chemical mechanical polishing (CMP) tools.
  • Compact completely disposable capsule consists of an all polypropylene Profile II filter element in a heat-welded polypropylene shell.
  • Profile II filter elements are technologically advanced depth filters with absolute removal ratings. The unique construction with built-in prefiltration assures long service life and consistent high level performance with neither breakthrough of contaminants nor shedding of filter medium.
  • The availability of absolute filter removal ratings, from 1 µm to 70 µm assures selection of the capsules to match the range of CMP slurries.
  • CMP capsules retain aggregated material and foreign matter and have not been shown to alter slurry polishing characteristics.
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Datasheets

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CMP Profile II Filter Capsules are designed for the filtration of both oxide and metal slurries at chemical mechanical polishing (CMP) tools.
  • Compact completely disposable capsule consists of an all polypropylene Profile II filter element in a heat-welded polypropylene shell.
  • Profile II filter elements are technologically advanced depth filters with absolute removal ratings. The unique construction with built-in prefiltration assures long service life and consistent high level performance with neither breakthrough of contaminants nor shedding of filter medium.
  • The availability of absolute filter removal ratings, from 1 µm to 70 µm assures selection of the capsules to match the range of CMP slurries.
  • CMP capsules retain aggregated material and foreign matter and have not been shown to alter slurry polishing characteristics.

Materials

  • Medium: Continuous polypropylene filament
  • Core: Polypropylene
  • Shell: Polypropylene

Removal Ratings

  • 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 40 μm, and 70 μm
    (Profile filter removal ratings can be 5 – 10 times finer than traditional ratings for depth filters.)

Operating Conditions1

  • Maximum Pressure:
    • 100 psid/7 bar @ 100 °F / 40 °C
  • Maximum Differential Pressure:
    • 60 psid/4 bar @ 77 °F / 25 °C
    • 30 psid/2 bar @ 140 °F / 60 °C
  • Maximum Temperature:
    • 140 °F / 60 °C @ 60 psi / 4 bar

Connections

  • Inlet/Outlet: 1⁄4 in. NPT
1 Recommendations are based on long term tests in water. Compatibility with other fluids must be checked before use.

CMP Capsule Pressure Drop2

CMP Capsule Pressure Drop

CMP Capsule Pressure Drop
2 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Filter Capsules
Part Number Removal Rating (μm) Connection
CMPY1NN04 1 1⁄4 in. NPT
CMPY1PN04 3 1⁄4 in. NPT
CMPY050N04 5 1⁄4 in. NPT
CMPY100N04 10 1⁄4 in. NPT
CMPY200N04 20 1⁄4 in. NPT
CMPY400N04 40 1⁄4 in. NPT
CMPY700N04 70 1⁄4 in. NPT

Unit conversion: 1 bar = 100 kilopascals

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