CMP Profile® II Filter Capsules product photo Primary L

CMP Profile® II Filter Capsules

CMP Profile II Filter Capsules are designed for the filtration of both oxide and metal slurries at chemical mechanical polishing (CMP) tools.
  • Compact completely disposable capsule consists of an all polypropylene Profile II filter element in a heat-welded polypropylene shell.
  • Profile II filter elements are technologically advanced depth filters with absolute removal ratings. The unique construction with built-in prefiltration assures long service life and consistent high level performance with neither breakthrough of contaminants nor shedding of filter medium.
  • The availability of absolute filter removal ratings, from 1 µm to 70 µm assures selection of the capsules to match the range of CMP slurries.
  • CMP capsules retain aggregated material and foreign matter and have not been shown to alter slurry polishing characteristics.


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Description
CMP Profile II Filter Capsules are designed for the filtration of both oxide and metal slurries at chemical mechanical polishing (CMP) tools.
  • Compact completely disposable capsule consists of an all polypropylene Profile II filter element in a heat-welded polypropylene shell.
  • Profile II filter elements are technologically advanced depth filters with absolute removal ratings. The unique construction with built-in prefiltration assures long service life and consistent high level performance with neither breakthrough of contaminants nor shedding of filter medium.
  • The availability of absolute filter removal ratings, from 1 µm to 70 µm assures selection of the capsules to match the range of CMP slurries.
  • CMP capsules retain aggregated material and foreign matter and have not been shown to alter slurry polishing characteristics.
Specifications

Materials

  • Medium: Continuous polypropylene filament
  • Core: Polypropylene
  • Shell: Polypropylene

Removal Ratings

  • 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 40 μm, and 70 μm
    (Profile filter removal ratings can be 5 – 10 times finer than traditional ratings for depth filters.)

Operating Conditions1

  • Maximum Pressure:
    • 100 psid/7 bar @ 100 °F / 40 °C
  • Maximum Differential Pressure:
    • 60 psid/4 bar @ 77 °F / 25 °C
    • 30 psid/2 bar @ 140 °F / 60 °C
  • Maximum Temperature:
    • 140 °F / 60 °C @ 60 psi / 4 bar

Connections

  • Inlet/Outlet: 14 in. NPT
1 Recommendations are based on long term tests in water. Compatibility with other fluids must be checked before use.
Performance

CMP Capsule Pressure Drop2

CMP Capsule Pressure Drop

CMP Capsule Pressure Drop
2 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Capsules
Use
Filtration
Ordering Information
Part Number Removal Rating (μm) Connection
CMPY1NN04 1 14 in. NPT
CMPY1PN04 3 14 in. NPT
CMPY050N04 5 14 in. NPT
CMPY100N04 10 14 in. NPT
CMPY200N04 20 14 in. NPT
CMPY400N04 40 14 in. NPT
CMPY700N04 70 14 in. NPT

Unit conversion: 1 bar = 100 kilopascals
Segment
Semiconductor