CMP StarKleen™ Filter Capsule product photo Primary L

CMP StarKleen™ Filter Capsule

CMP StarKleen filter capsules are designed for the filtration of oxide and metal (including copper) slurries on or near tools used in chemical mechanical polishing (CMP).
  • Compact, completely disposable, all polypropylene filter capsule with Flaretek1 connections for easy changeout. Vents and drains are available with either NPT or Flaretek fittings.
  • The capsules contain either depth or pleated style Profile® filters. The relatively deep, wide pleats of the Profile Star filters easily handle fluids containing high suspended solids. This design results in low differential pressures, which minimize shear and provide long service life.
  • The unique construction of these depth filters provides for built-in prefiltration assuring long service life with no breakthrough of contaminants nor shedding of filter medium.
  • Profile depth filters provide a sharp boundary between transmission of native slurry particles and removal of gels and aggregates.
1 Flaretek is a trademark of Entegris, Inc.


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Description
CMP StarKleen filter capsules are designed for the filtration of oxide and metal (including copper) slurries on or near tools used in chemical mechanical polishing (CMP).
  • Compact, completely disposable, all polypropylene filter capsule with Flaretek1 connections for easy changeout. Vents and drains are available with either NPT or Flaretek fittings.
  • The capsules contain either depth or pleated style Profile® filters. The relatively deep, wide pleats of the Profile Star filters easily handle fluids containing high suspended solids. This design results in low differential pressures, which minimize shear and provide long service life.
  • The unique construction of these depth filters provides for built-in prefiltration assuring long service life with no breakthrough of contaminants nor shedding of filter medium.
  • Profile depth filters provide a sharp boundary between transmission of native slurry particles and removal of gels and aggregates.
1 Flaretek is a trademark of Entegris, Inc.
Specifications

Materials

  • Medium: Continuous polypropylene filament
  • Core, cage: Polypropylene
  • Shell: Polypropylene

Removal Ratings

  • 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 1.5 μm, 3 μm, and 5 μm (Profile filter media removal ratings can be 5 – 10 times finer than traditional ratings for depth filters.)

Operating Conditions

  • Maximum pressure: 75 psi @ 77 °F / 5 bar @ 25 °C
  • Maximum Differential Pressure: 45 psid @ 77 °F / 3 bar @ 25 °C
  • Maximum Temperature: 100 °F @ 30 psi / 40 °C @ 2 bar

Connections

  • Inlet / Outlet: 38 in. Flaretek
  • Vent / Drain: 14 in. Flaretek or 14 in. NPT
1Flaretek is a trademark of Entegris, Inc.
Performance

Pressure Drop vs. Liquid Flow Rate1

Pressure Drop vs. Liquid Flow Rate

Pressure Drop vs. Liquid Flow Rate
1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Capsules
Use
Filtration
Ordering Information
Part Number Removal Rating (μm) Vent / Drain Connection
DFA2Y005F64 0.5 14 in. Flaretek
DFA2Y005F6N4 0.5 14 in. NPT
DFA2A010F64 1 14 in. Flaretek
DFA2A010F6N4 1 14 in. NPT
DFA2A015F64 1.5 14 in. Flaretek
DFA2A015F6N4 1.5 14 in. NPT
DFA2A030F64 3 14 in. Flaretek
DFA2A030F6N4 3 14 in. NPT
DFA2A050F64 5 14 in. Flaretek
DFA2A050F6N4 5 14 in. NPT

Unit conversion: 1 bar = 100 kilopascals
Segment
Semiconductor