CMP StarKleen™ Nano Filter Capsules  product photo Primary L

CMP StarKleen™ Nano Filter Capsules

CMP StarKleen™ Nano filter capsules have been developed for the classification of both ceria and low solids colloidal silica slurries at or near tools used in advanced CMP processes, such as shallow trench isolation (STI) and barrier copper. Pall’s most advanced melt-blowing process has been utilized to manufacture extremely fine fibers that improve removal efficiency of particles as fine as 100 nm. The ultra-fine fiber matrix is ideally suited for removing particles like ceria that are predominantly captured by mechanical filtration mechanisms like sieving.

  • Multi-zone pore construction optimizes both efficiency and long service life
  • Compact, completely disposable all-polypropylene material with Flaretek1 connections for easy change-outs. Vents and drains are available with either NPT or Flaretek fittings
  • Each zone is manufactured to a given specification that ensures consistent, reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
1Flaretek is a trademark of Entegris, Inc.


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Description

CMP StarKleen™ Nano filter capsules have been developed for the classification of both ceria and low solids colloidal silica slurries at or near tools used in advanced CMP processes, such as shallow trench isolation (STI) and barrier copper. Pall’s most advanced melt-blowing process has been utilized to manufacture extremely fine fibers that improve removal efficiency of particles as fine as 100 nm. The ultra-fine fiber matrix is ideally suited for removing particles like ceria that are predominantly captured by mechanical filtration mechanisms like sieving.

  • Multi-zone pore construction optimizes both efficiency and long service life
  • Compact, completely disposable all-polypropylene material with Flaretek1 connections for easy change-outs. Vents and drains are available with either NPT or Flaretek fittings
  • Each zone is manufactured to a given specification that ensures consistent, reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
1Flaretek is a trademark of Entegris, Inc.
Specifications
 
Materials
  • Medium: Polypropylene
  • Core, cage: Polypropylene
  • Shell: Polypropylene
Removal ratings
  • 100 nm
Operating conditions2
  • Maximum operating pressure: 0.5 MPa @ 25°C / 72.5 psig @ 77°F
  • Maximum operating pressure: 0.2 MPa @ 40°C / 29 psig @ 104°F
  • Maximum operating temperature: 40°C / 104°F
Connections
  • Inlet / outlet:
    1/4” NPT, 3/8” NPT, 1/4” Flaretek, 3⁄8" Flaretek
  • Vent / drain:
    1/8” NPT, 1/4” NPT, 1/4” Flaretek
 

1Flaretek is a trademark of Entegris, Inc.
2In compatible fluids which do not soften, swell, or adversely affect the filter performance or materials of construction.

Dimensions

Performance

Pressure Drop vs. Liquid Flow Rate3



3For liquids with a different viscosity than water, multiply the pressure drop by the viscosity in centipoise.
Type
Capsules
Use
Filtration
Ordering Information

Part Numbers / Ordering Information

 
Part number Removal Rating Connections
Inlet, outlet / Vent, drain
Nominal length
(mm/in)
DFA4201NP100 100 nm 1/4” NPT / 1/8” NPT 114.55 / 4.51
DFA1NP100FL4N2 100 nm 1/4” Flaretek / 1/8” NPT 114.55 / 4.51
DFA2NP100F64 100 nm 3/8” Flaretek / 1/4” Flaretek 213.40 / 8.4
 
Segment
Semiconductor