CMPure CMPD Series Filter Cartridges product photo Primary L

CMPure CMPD Series Filter Cartridges

The CMPure CMPD advanced melt blown depth cartridges are specifically optimized for CMP slurry systems resulting in highly consistent and repeatable filter performance. CMPD filters feature our proprietary CoLD fiber melt blowing technology, which integrates Co-Located Large Diameter fibers within the fine fiber matrix to produce a rigid structural network to the cartridge. As a result, CMPD filters provide outstanding structural strength, resistance to contaminant unloading and exceptionally long service life.
  • All polypropylene construction
  • Continuous gradient pore structure for built-in prefiltration
  • Compatible with metal (W, Cu, Al), oxide and STI slurries
  • Available also as disposable filter capsules


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Description
The CMPure CMPD advanced melt blown depth cartridges are specifically optimized for CMP slurry systems resulting in highly consistent and repeatable filter performance. CMPD filters feature our proprietary CoLD fiber melt blowing technology, which integrates Co-Located Large Diameter fibers within the fine fiber matrix to produce a rigid structural network to the cartridge. As a result, CMPD filters provide outstanding structural strength, resistance to contaminant unloading and exceptionally long service life.
  • All polypropylene construction
  • Continuous gradient pore structure for built-in prefiltration
  • Compatible with metal (W, Cu, Al), oxide and STI slurries
  • Available also as disposable filter capsules
Specifications

Materials

  • Medium: Polypropylene
  • Core, cage and end caps: Polypropylene
  • O-ring option: EPDM, Viton1

Removal Ratings

  • 0.5 μm, 1.5 μm, 2 μm, 5 μm, 10 μm, 15 μm, 20 μm, 30 μm and 50 μm

Configurations

  • Nominal lengths:
    • 102 mm / 4 in.
    • 254 mm / 4 in.
    • 508 mm / 20 in.
    • 762 mm / 30 in.
    • 1016 mm / 40 in.
  • Diameter: 66 mm / 2.6 in.

Operating Conditions

  • Maximum temperature: 82 °C / 180 °F
  • Maximum differential pressure:
    • 0.4 MPa @ 30 °C / 60 psid @ 86 °F
    • 0.2 MPa @ 66 °C / 30 psid @ 150 °F
    • 0.1 MPa @ 82 °C / 15 psid @ 180 °F
Performance

Pressure Drop vs. Liquid Flow Rate2

Pressure Drop vs. Liquid Flow Rate
2 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Cartridges and Elements
Use
Filtration
Ordering Information
This information is a guide to the part number structure and possible options. For availability of specific options and housing details, please contact Pall.

Example Part Number: CMPD 10 4 U H21 F ( See bold references in tables below)

Part Number:
CMPD < Removal Rating Code from Table 1 > < Nominal Length Code from Table 2 > < Material of Construction Code from Table 3 > < Cartridge End Configuration Code from Table 4 > < O-ring Material Code from Table 5 >

Table 1 - Removal Rating

Code Removal Rating (μm)
0.5 0.5
1.5 1.5
2 2
5 5
10 10
15 15
20 20
30 30
50 50

Table 2 - Nominal Length

Code Nominal Length (in. / mm)
4 4 / 102
10 10 / 254
20 20 / 508
30 30 / 762
40 40 / 1016

Table 3 - Material of Construction

Code Material of Construction
U Polypropylene

Table 4 - Cartridge End Configuration

Code Cartridge End Configuration
M3 SOE flat closed end, 222 O-rings
H21 Double open end, santoprene1 gasket seal

Table 5 - O-ring Material

Code O-ring Material
E EPDM
F Teflon1 Encapsulated Viton A
V Viton A

Due to changing formulations and process improvements in CMP, please contact Pall Microelectronics for availability of latest filtration recommendations, including < 0.5 μm depth filters and different length cartridges.

These filter cartridges are also available in disposable capsules. See specifications for the Kleen-Change® In-Line Filter Capsules.

1 Teflon and Viton are trademarks of E. I. du Pont de Nemours and Company.


Unit conversion: 1 bar = 100 kilopascals
Segment
Semiconductor