Profile® II Filters for CMP Applications product photo Primary L

ProfileĀ® II Filters for CMP Applications

Profile II filters effectively remove agglomerated particles and gels from oxide, tungsten and copper CMP slurries, while not affecting slurry particle distribution.
  • Depth filter with consistent, reproducible performance
  • Continuously profiled pore structure for built-in prefiltration and long service life
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles


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Description
Profile II filters effectively remove agglomerated particles and gels from oxide, tungsten and copper CMP slurries, while not affecting slurry particle distribution.
  • Depth filter with consistent, reproducible performance
  • Continuously profiled pore structure for built-in prefiltration and long service life
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
Specifications

Materials

  • Medium: Polypropylene
  • Core, cage and end caps: Polypropylene
  • O-rings option: Ethylene propylene (EPR)

Removal Ratings

  • 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 30 μm and 40 μm (Profile filter removal ratings can be 5–10 times finer than traditional ratings for depth filters.)

Configurations

  • Nominal length: 254 mm / 10 in., 508 mm / 20 in., 762 mm / 30 in. and 1016 mm / 40 in.
  • O-ring size / end caps:
    Code 3 (222 double O-ring flat end)
    Code 25 (222 double O-ring flat end)

Operating Conditions

  • Maximum Temperature: 82 °C/180 °F
  • Maximum Differential Pressure:
    0.41 MPa @ 30 °C / 60 psig @ 85 °F;
    0.34 MPa @ 50 °C / 50 psid @ 120 °F;
    0.2 MPa @ 70 °C / 30 psid @ 160 °F;
    0.1 MPa @ 82 °C / 15 psid @ 180 °F
Performance

Pressure Drop vs. Liquid Flow Rate1

Pressure Drop vs. Liquid Flow Rate
1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Cartridges and Elements
Ordering Information
 
Part Number Removal Rating2 (μm) Nominal Length2 (mm / in.) Configuration Code2 O-Ring Material2
AB1Y00225J 0.2 254 / 10 25 EPR
AB2Y00225J 0.2 508 / 20 25 EPR
AB1Y0033J 0.3 254 / 10 3 EPR
AB2Y0033J 0.3 508 / 20 3 EPR
AB1Y0053J 0.5 254 / 10 3 EPR
AB2Y0053J 0.5 508 / 20 3 EPR
AB1Y0103J 1 254 / 10 3 EPR
AB2Y0103J 1 508 / 20 3 EPR
AB1Y0303J 3 254 / 10 3 EPR
AB2Y0303J 3 508 / 20 3 EPR
AB1Y0503J 5 254 / 10 3 EPR
AB2Y0503J 5 508 / 20 3 EPR
AB1Y1003J 10 254 / 10 3 EPR
AB2Y1003J 10 508 / 20 3 EPR
AB1Y2003J 20 254 / 10 3 EPR
AB2Y2003J 20 508 / 20 3 EPR
AB1Y3003J 30 254 / 10 3 EPR
AB2Y3003J 30 508 / 20 3 EPR
AB1Y4003J 40 254 / 10 3 EPR
AB2Y4003J 40 508 / 20 3 EPR
 
2 Other removal ratings, lengths, configurations, and O-ring materials are available.

Unit conversion: 1 bar = 100 kilopascals
Application
CMP, CMP