Profile® II Filters for CMP Applications product photo Primary L

ProfileĀ® II Filters for CMP Applications

Profile II filters effectively remove agglomerated particles and gels from oxide, tungsten and copper CMP slurries, while not affecting slurry particle distribution.
  • Depth filter with consistent, reproducible performance
  • Continuously profiled pore structure for built-in prefiltration and long service life
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles


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Description
Profile II filters effectively remove agglomerated particles and gels from oxide, tungsten and copper CMP slurries, while not affecting slurry particle distribution.
  • Depth filter with consistent, reproducible performance
  • Continuously profiled pore structure for built-in prefiltration and long service life
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
Specifications

Materials

  • Medium: Polypropylene
  • Core, cage and end caps: Polypropylene
  • O-rings option: Ethylene propylene (EPR)

Removal Ratings

  • 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 30 μm and 40 μm (Profile filter removal ratings can be 5–10 times finer than traditional ratings for depth filters.)

Configurations

  • Nominal length: 254 mm / 10 in., 508 mm / 20 in., 762 mm / 30 in. and 1016 mm / 40 in.
  • O-ring size / end caps:
    Code 3 (222 double O-ring flat end)
    Code 25 (222 double O-ring flat end)

Operating Conditions

  • Maximum Temperature: 82 °C/180 °F
  • Maximum Differential Pressure:
    0.41 MPa @ 30 °C / 60 psig @ 85 °F;
    0.34 MPa @ 50 °C / 50 psid @ 120 °F;
    0.2 MPa @ 70 °C / 30 psid @ 160 °F;
    0.1 MPa @ 82 °C / 15 psid @ 180 °F
Performance

Pressure Drop vs. Liquid Flow Rate1

Pressure Drop vs. Liquid Flow Rate
1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Cartridges and Elements
Use
Filtration
Ordering Information
 
Part Number Removal Rating2 (μm) Nominal Length2 (mm / in.) Configuration Code2 O-Ring Material2
AB1Y00225J 0.2 254 / 10 25 EPR
AB2Y00225J 0.2 508 / 20 25 EPR
AB1Y0033J 0.3 254 / 10 3 EPR
AB2Y0033J 0.3 508 / 20 3 EPR
AB1Y0053J 0.5 254 / 10 3 EPR
AB2Y0053J 0.5 508 / 20 3 EPR
AB1Y0103J 1 254 / 10 3 EPR
AB2Y0103J 1 508 / 20 3 EPR
AB1Y0303J 3 254 / 10 3 EPR
AB2Y0303J 3 508 / 20 3 EPR
AB1Y0503J 5 254 / 10 3 EPR
AB2Y0503J 5 508 / 20 3 EPR
AB1Y1003J 10 254 / 10 3 EPR
AB2Y1003J 10 508 / 20 3 EPR
AB1Y2003J 20 254 / 10 3 EPR
AB2Y2003J 20 508 / 20 3 EPR
AB1Y3003J 30 254 / 10 3 EPR
AB2Y3003J 30 508 / 20 3 EPR
AB1Y4003J 40 254 / 10 3 EPR
AB2Y4003J 40 508 / 20 3 EPR
 
2 Other removal ratings, lengths, configurations, and O-ring materials are available.

Unit conversion: 1 bar = 100 kilopascals
Application
CMP, CMP
Segment
Semiconductor