DFA™-EZ Filter Assembly product photo Primary L

DFA™-EZ Filter Assembly

The DFA™-EZ compact filter capsule assembly is designed for small volume processing. The configuration allows for quick, safe and simple filter change-outs and easy maintenance. It is ideally suited for point-of-use filtration of photoresists, various slurries and other compatible liquids.
  • In-line flow path with minimal dead space
  • One-step quick disconnect filter replacement
  • The Profile® depth filter media is ideally suited for the removal of gels, aggregates and oversize particles
  • Capsule design prevents incorrect orientation and installation
  • Nozzle connections can be readily removed for cleaning
  • Compact size
  • Ease of use minimizes down-time
  • Minimizes operator exposure to solvents
  • Small footprint permits installation in narrow confines


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Description
The DFA™-EZ compact filter capsule assembly is designed for small volume processing. The configuration allows for quick, safe and simple filter change-outs and easy maintenance. It is ideally suited for point-of-use filtration of photoresists, various slurries and other compatible liquids.
  • In-line flow path with minimal dead space
  • One-step quick disconnect filter replacement
  • The Profile® depth filter media is ideally suited for the removal of gels, aggregates and oversize particles
  • Capsule design prevents incorrect orientation and installation
  • Nozzle connections can be readily removed for cleaning
  • Compact size
  • Ease of use minimizes down-time
  • Minimizes operator exposure to solvents
  • Small footprint permits installation in narrow confines
Specifications

Materials
Filter Capsule

  • Medium: Polypropylene
  • Core, cage, end caps, support, drainage and housing: Polypropylene
  • End seal/Side seal: Heat sealed
  • O-ring options: EPDM, Perfluoroelastomer

Head Manifold

  • Frame: SUS 304 (FEP coated)
  • Connection Nozzles: Polyethylene

Removal Ratings

  • 1.5 μm, 3 μm, 5 μm

Operating Conditions

  • Maximum Operating Temperature: 38 °C
  • Maximum Operating Pressure: 0.19 MPa @ 38 °C

Connections

  • Inlet/Outlet: 6 mm Swagelok2 compatible, .25 in. Swagelok compatible
  • Vent/Drain 6 mm Swagelok compatible, .25 in. Swagelok compatible
2 Swagelok is a trademark of Swagelok Co.
Performance

Pressure Drop vs. Liquid Flow Rate3

Pressure Drop vs. Liquid Flow Rate
3 For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Assemblies, Capsules
Use
Filtration
Additional Information

Dimensions

Filter Capsule

Filter Capsule

Head Manifold

Head Manifold
Ordering Information
Filter Capsule Part Number Removal Rating (μm) O-Ring Material
DEZ1A015FJ 1.5 EPDM
DEZ1A015FH23 1.5 Perfluoro elastomer
DEZ1A030FJ 3 EPDM
DEZ1A030FH23 3 Perfluoro elastomer
DEZ1A050FJ 5 EPDM
DEZ1A050FH23 5 Perfluoro elastomer
Head Manifold Part Number Connection : Inlet/Outlet Connection : Vent/Drain
DH1SW66M 6 mm Swagelok compatible 6 mm Swagelok compatible
DH1SW44 14 in. Swagelok compatible 14 in. Swagelok compatible
Spare Parts (Connection Nozzles)4
Part Number
Connection : Inlet/Outlet Connection : Vent/Drain
F-DH-SW66M 6 mm Swagelok compatible 6 mm Swagelok compatible
F-DH-SW44 14 in. Swagelok compatible 14 in. Swagelok compatible
4 Connection nozzles contain all 4 pieces for inlet, outlet, vent and drain.


Specifications and availability: The information provided in this literature was reviewed for accuracy at the time of publication. Product availability may be subject to change without notice. For current information, consult your local Pall office or distributor.
Application
Photolithography, Color Filter