Falcon® Filter product photo Primary L

Falcon® Filter

The Falcon Photoresist filter has been specifically designed to filter point-of-use photoresist. This filter uses a special patented flow pattern construction and a patented crescent shaped Ultipleat®filter configuration to provide optimum performance.

  • Optimized design for low hold-up volume
  • Superior flow characteristics
  • Excellent compatibility
  • Low differential pressure
  • Low extractables
  • Manufactured in a cleanroom environment
  • 100% integrity tested
  • Captured O-ring to ease in change out
  • Designed to fit most older photoresist dispense systems


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Description
The Falcon Photoresist filter has been specifically designed to filter point-of-use photoresist. This filter uses a special patented flow pattern construction and a patented crescent shaped Ultipleat®filter configuration to provide optimum performance.

  • Optimized design for low hold-up volume
  • Superior flow characteristics
  • Excellent compatibility
  • Low differential pressure
  • Low extractables
  • Manufactured in a cleanroom environment
  • 100% integrity tested
  • Captured O-ring to ease in change out
  • Designed to fit most older photoresist dispense systems
Specifications

Materials of Construction

 
Components Materials
Filter Medium PTFE
Support and Drainage High density polyethylene (HDPE)
Core, Cage and End Caps High density polyethylene (HDPE)
O-ring Options Kalrez1, EPDM
 
1 Kalrez is a trademark of DuPont.

 
Removal Ratings 0.2 μm, 0.1 μm, 0.05 μm
Configurations MCD9116 MCD9140 / 9240
Filter Areas 0.180 m2 / 1.9 ft2 0.454 m2 / 4.8 ft2
Maximum Operating
Temperature
60 ˚C / 140 ˚F
Maximum Forward /
Reverse Differential Pressure
410 kPa @ 60 ˚C / 60 psid @ 140 ˚F
 

Filter Capsule Dimensions


Performance

Pressure Drop vs. Liquid Flow Rate (Water, 20 °C)


MCD9116
MCD9116



MCD9140 / MCD 9240
MCD9140 / MCD 9240


Type
Cartridges and Elements
Use
Filtration
Ordering Information

Part Numbers / Ordering Information


MCD[1] UF [2] E[3]

Table 1
 
Code Cartridge Length O-ring Specifications
9116 52 mm / 2.0 in AS568A-015
9140 112 mm / 4.4 in AS568A-015
9240 121 mm / 4.8 in AS568A-118
 

Table 2
 
Code Removal Ratings
D 0.05 μm
T 0.1 μm
R 0.2 μm
 

Table 3
 
Code O-ring Materials
H11 Kalrez
J EPDM
 

Representative example part numbers


MCD9116UFREJ
MCD9116UFREH11
MCD9116UFTEH
MCD9116UFTEJ
MCD9116UFTEH11
MCD9116UFDEH
MCD9116UFDEJ
MCD9116UFDEH11
      MCD9140UFREH
MCD9140UFREJ
MCD9140UFREH11
MCD9140UFTEJ
MCD9140UFTEH11
MCD9140UFDEH
MCD9140UFDEJ
MCD9140UFDEH11
      MCD9240UFTEH11
MCD9240UFDEH11
Application
Photolithography, Photolithography
Segment
LED
Semiconductor