Micro Kleen-Change® Filter Assembly (Llithography) product photo Primary L

Micro Kleen-Change® Filter Assembly (Llithography)

The Micro Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low holdup volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.
  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured


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Description
The Micro Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low holdup volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.
  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured
Specifications

Materials

  • Medium: PTFE
  • Support & Drainage: PFA
  • Shell, core, and end caps: PFA440HP

Removal Ratings

  • 0.05 μm , 0.1 μm

Filter Area

  • 100 cm2 / 15.5 in.2

Connections: Inlet/Outlet, Vent/Drain

  • 18 in. Swagelok1 / 18 in. Swagelok

Operating Conditions

  • Maximum operating pressure:
    • 58 psi @ 77 °F / 4 bar @ 25 °C
    • 29 psi @ 194 °F / 2.0 bar @ 90 °C
    • 20 psi @ 248 °F / 1.5 bar @ 120 °C
  • Maximum forward differential pressure: 28 psid @ 68°F / 1.9 bar @ 20°C

Recommended Applications:

  • Spin on glass (SOG)
  • Hexamethyldisilazane (HMDS)
1 Swagelok is a registered trademark of Swagelok Co.
Performance

Pressure Drop vs. Liquid Flow Rate*

Pressure Drop vs. Liquid Flow Rate
* For liquids with viscosity differing from 1cP, multiply the pressure drop by the viscosity in centipoise.
Type
Assemblies, Capsules
Use
Filtration
Ordering Information
Part Number Removal
Rating (μm)
Connection: (In / Out, Vent / Drain) Length L
(in. / mm)
LDFN01F001SW22 0.1 18 in. Swagelok, 18 in. Swagelok 3.1 / 78
LDFN01F0005SW22 0.05 18 in. Swagelok, 18 in. Swagelok 3.1 / 78

Unit conversion: 1 bar = 100 kilopascals
Application
Photolithography, ODF
Segment
Display
Semiconductor