Ultipleat P-Nylon Filter (Lithography) product photo Primary L

Ultipleat P-Nylon Filter (Lithography)

The Ultipleat P-Nylon filter is recommended specifically for bulk filtration of photoresists, solvents, TMAH-based developers and other chemicals, that are compatible with nylon 6,6 and High Density Polyethylene (HDPE). The filter design incorporates the latest advance in Pall filtration technology: the crescent shaped Ultipleat® filter configuration.
  • Naturally hydrophilic
  • Quick venting
  • Wide range of configurations
  • High flow rates
  • Integrity testable
  • Low extractables
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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Description
The Ultipleat P-Nylon filter is recommended specifically for bulk filtration of photoresists, solvents, TMAH-based developers and other chemicals, that are compatible with nylon 6,6 and High Density Polyethylene (HDPE). The filter design incorporates the latest advance in Pall filtration technology: the crescent shaped Ultipleat® filter configuration.
  • Naturally hydrophilic
  • Quick venting
  • Wide range of configurations
  • High flow rates
  • Integrity testable
  • Low extractables
  • Manufactured in a cleanroom environment
  • 100% integrity tested
Specifications

Materials

  • Medium: Hydrophilic nylon 6,6
  • Core, cage, and end caps: High Density Polyethylene (HDPE)
  • Support and drainage: High Density Polyethylene (HDPE)
  • O-ring options: Viton1 and FEP encapsulated elastomer

Removal Ratings

  • 0.1 μm, 40 nm, 20 nm

Filter Areas

  • 0.1 μm UNI: 0.93 m2 / 10 ft2 per 10 in.
  • 40 nm UND: 1.2 m2 / 13 ft2 per 10 in.
  • 20 nm UNM: 1.4 m2 / 15 ft2 per 10 in.

Configurations

  • Nominal length:
    • 254 mm / 10 in.
    • 508 mm / 20 in.
    • 762 mm / 30 in.
    • 1016 mm / 40 in.
  • Diameter: 70 mm / 2.75 in.
  • O-ring size / end caps:
    • Code 3: 222 double O-ring / flat end
    • Code 8: 222 double O-ring / finned end
    • Code 7: 226 double O-ring bayonet lock / finned end
    • MR Code 3: 222 double O-ring / flat end designed to retrofit Code 0 elements

Operating Conditions

  • Maximum operating temperature: 50 °C / 120 °F
  • Maximum forward / reverse differential pressure: 275 kPa @ 20 °C / 40 psid @ 68 °F

Recommended Applications

  • Anti-reflective coatings
  • Up to 3% TMAH-based developers
  • i-line, 248 nm, and 193 nm photoresists
  • Solvents
1 Viton is a registered trademark of E. I. du Pont de Nemours and Company
Performance

Pressure Drop vs. Liquid Flow Rate2




2 For liquids with a viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Filter Cartridges
Ordering Information
 
Part Number3 Removal Rating Nominal Length (mm / in.) Configuration Code O-Ring Material4
ABD1UNI3EH1 0.1 μm 254 / 10 3 FEP encapsulated elastomer
ABD1UNI8EH1 0.1 μm 254 / 10 8 FEP encapsulated elastomer
MRD1UNI3EH1 0.1 μm 254 / 10 3 FEP encapsulated elastomer
ABD1UND3EH1 40 nm 254 / 10 3 FEP encapsulated elastomer
ABD1UND8EH1 40 nm 254 / 10 8 FEP encapsulated elastomer
ABD1UNM3EH1 20 nm 254 / 10 3 FEP encapsulated elastomer
ABD1UNM8EH1 20 nm 254 / 10 8 FEP encapsulated elastomer
 
3 The above filter configurations are also available in 508 mm / 20 in., 762 mm / 30 in., and 1016 mm / 40 in. lengths. These can be ordered by changing the fourth digit in the part number to a 2, 3, or 4 respectively.
4 Other O-ring materials are available.


Unit conversion: 1 bar = 100 kilopascals
Application
Photolithography