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Download:Description
The PE-Kleen filter combines the latest advances in polyethylene membrane technology with Pall’s unique crescent-shaped Ultipleat® filter technology. The result is a cartridge with the outstanding particle retention characteristics required by the semiconductor industry.
The PE-Kleen filter is specifically designed for the filtration of ultra-high-purity chemicals. It is recommended for applications involving antireflective coatings and bulk filtration of 248 nm and 193 nm photoresist. The XP option is available for advanced lithography processes.
Features
- Excellent gel-retention characteristics
- High flow rates
- Low extractables
- 100% integrity tested
- Manufactured in a cleanroom
- Minimized organic extractables by XP option
- XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.
Specifications
Materials of Construction
| Components | Materials |
| Filter medium | HDPE |
| Support and drainage | HDPE |
| Core, cage and end caps | HDPE |
| O-ring options | EPR, FEP Encapsulated fluoroelastomer and Perfluoroelastomer |
| ABD Filters | ||||||
| Removal Ratings | 2 nm | 5 nm | 10 nm | 30 nm | 0.05 μm | 1.0 μm |
| Filter Areas | 1.3 m2 | 1.3 m2 | 1.3 m2 | 1.1 m2 | 1.4 m2 | 1.1 m2 |
| Maximum Operating Temperature | 50 ˚C / 122 ˚F | |||||
| Maximum forward differential pressure | 340 kPa @ 40 ˚C / 49 psid @ 104 ˚F | |||||
Performance
Pressure Drop vs. Liquid flow Rate (Water, 20 °C)
Type
Filter Cartridges
Ordering Information
Part Numbers / Ordering Information1, 2
ABD [1] UG [2] [3] E [4]
Table 1
| Code | Nominal length (mm / in) |
| 1 | 254 / 10 |
| 2 | 508 / 20 |
| 3 | 762 / 30 |
Table 2
| Code | Removal Ratings |
| 2 | 2 nm |
| 5 | 5 nm |
| 001 | 10 nm |
| 003 | 30 nm |
| 005 | 0.05 μm |
| 100 | 1.0 μm |
Table 3
| Code | Configurations |
| 3 | 222 O-ring open end flat closed end |
| 7 | 226 O-ring open end fin on closed end |
| 8 | 222 O-ring open end fin on closed end |
Table 4
| Code | O-ring Materials |
| J | EPR |
| H1 | FEP Encapsulated fluoroelastomer |
| H11 | Perfluoroelastomer |
1Filter elements may not be available in all configurations. Contact your local Pall representative for availability.
2For XP option, add –XP to end of part number for 2 - 10nm removal ratings and 10 - 20 inches.
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