PhotoKleen™ DDF Filter Assembly product photo Primary L

PhotoKleen™ DDF Filter Assembly

The PhotoKleen flter assembly is a compact capsule assembly designed for clean, simple and safe filter changeout. It is well suited for applications that demand higher purity – such as developer, solvents and photoresist filtration – because it eliminates all polypropylene components. Use of the assembly in systems can improve overall performance. The XP option is available for advanced lithography processes.

Features

  • Low hold-up volume
  • Vent at highest location
  • Drain a lowest location
  • Low Pressure drop
  • Manufactured in a cleanroom environment
  • O-ring less design
  • Minimized organic extractables by XP option
  • XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.

Benefits

  • Faster start-up
  • Minimize chemical waste


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Description
The PhotoKleen flter assembly is a compact capsule assembly designed for clean, simple and safe filter changeout. It is well suited for applications that demand higher purity – such as developer, solvents and photoresist filtration – because it eliminates all polypropylene components. Use of the assembly in systems can improve overall performance. The XP option is available for advanced lithography processes.

Features

  • Low hold-up volume
  • Vent at highest location
  • Drain a lowest location
  • Low Pressure drop
  • Manufactured in a cleanroom environment
  • O-ring less design
  • Minimized organic extractables by XP option
  • XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.

Benefits

  • Faster start-up
  • Minimize chemical waste
Specifications

Materials of Construction

 
Components Materials
Filter Medium PE-Kleen filter : HDPE (high density polyethylene)
P-Nylon filter : Asymmetric Nylon 6,6
Support and Drainage HDPE (high density polyethylene)
Shell, Core, Cage and End Caps HDPE (high density polyethylene)
 
 
  PE-Kleen filter P-Nylon filter
Grade UG2 UG5 UG001 UG003 XN2L HXN5 AN01 ANM AND AN151
Removal Ratings 2 nm 5 nm 10 nm 30 nm 2 nm 5 nm 10 nm 20 nm 40 nm 0.15 μm
Filter areas (cm2) DDF1 2,600 2,500 2,500 2,200 2,900 1,900 2,500 2,500 2,500 2,500
DDF2 5,200 5,200 5,100 4,400 5,900 4,100 5,300 5,300 5,300 -
Maximum Operating Temperature 30 ˚C / 86 ˚F
Maximum Operating Pressure 290 kPaG @ 30 ˚C / 42 psi @ 86 ˚F
Maximum Forward Differential Pressure 290 kPa @ 30 ˚C / 42 psid @ 86 ˚F
 
1 Available for DDF1 configuration only.


Dimensions

Performance

Typical Flow Characteristics - 1cP fluid (20℃)





Type
Filter Capsules
Ordering Information

Part Numbers / Ordering Information2, 3

DDF [1] [2] E [3]

Table 1

 
Code Scale
1 Small volume
2 Middle volume
 

Table 2

 
Code Medium Removal Ratings
UG2 HDPE 2 nm
UG5 HDPE 5 nm
UG001 HDPE 10 nm
UG003 HDPE 30 nm
XN2L Nylon 6,6 2 nm
HXN5 Nylon 6,6 5 nm
AN01 Nylon 6,6 10 nm
ANM Nylon 6,6 20 nm
AND Nylon 6,6 40 nm
AN15 Nylon 6,6 0.15 μm
 

Table 3

 
Code Connections
Inlet, Outlet / Vent, Drain
NP44 14 in. Pillar fitting4 / 14 in. Pillar fitting
FL44 14 in. flare style / 14 in. flare style
FL64 38 in. flare style / 14 in. flare style
 


2 Filter elements may not be available in all configurations. Contact your local Pall representative for availability.
3 For XP option, add –XP to the end of a part number for 10nm / 20nm removal ratings.
  (XP treatment is standard for 2nm / 5nm products)
4 Pillar fitting is a trademark of Nippon Pillar Packing Co., Ltd.
Application
Photolithography