Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal product photo Primary L

Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.
  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • Available with a 14 in. VCR1 port on top of assembly for a pressure gauge or other component
  • Improved corrosion resistance using Pall's proprietary process
1 VCR is a registered trademark of Swagelok Company


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Description

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.
  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • Available with a 14 in. VCR1 port on top of assembly for a pressure gauge or other component
  • Improved corrosion resistance using Pall's proprietary process
1 VCR is a registered trademark of Swagelok Company

Specifications

Filter Medium 316L stainless steel
Internal Surface Finish ≤ 0.7 μm Rmax
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM / VAR specifications
Removal Rating ≥ 3 nm
Particle Removal Characteristics 109 reduction at rated flow of 5 slpm
106 reduction at rated flow of 15 slpm
104 reduction at rated flow of 30 slpm
Connections W-seal, 11⁄2˝ interface
Leak Rating 100% helium leak tested to 10-9 atm•cm3/s
Design validated to 10-11 atm•cm3/s
Maximum Operating Pressure 0.97 MPa @ 40 °C / 140 psig @ 104 °F
Maximum Allowable Differential Pressure 0.69 MPa @ 40 °C / 100 psid @ 104 °F
EU pressure equipment directive Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU
1 VCR is a registered trademark of Swagelok Company

Performance

Pressure Drop vs. Gas Flow Rate

F3200

F3200

Type

Filter Capsules

Additional Information

Dimensions

GTM-3200F4A

GTM-3200F4A

GTMF3200F4A-VM4

GTMF3200F4A-VM4

Ordering Information

Part Number Description1 Height (H)
(mm / in.)
Design Flow
Rate (slpm)
GTMF3200F4A All 316L stainless steel 42 / 1.65 0-30
GTMF3200F4A-VM4 All 316L stainless steel
14 in. VCR port
60 / 2.36 0-30
1 Please contact Pall Microelectronics for other configurations.

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