Home/
Microelectronics/
Semiconductor/
Process gas filtration/
Gasket-Sert™ PSP Filter 1 1/8'' W-seal

Product image is a representative example for illustration purposes; actual image may vary

Gasket-Sert™ PSP Filter 1 1/8'' W-seal

The Gasket-Sert PSP W-seal filter is designed to protect major components of gas panels in semiconductor gas
distribution systems. The W-seal gasket is easy to install into any system that uses W-seal-type components.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)


Feature	Benefit	Value
Welded to W-seal gasket	Filter can replace any W-seal gasket	Lower installation cost
Contains alignment retainer	Easy installation into system with minimal operator handling	Lower labor cost
All stainless steel construction	Broad compatibility with semiconductor process gases	Long service life
No housing required	No hold-up volume and zero gas displacement	Faster start-up time
Cleanroom packaged	High level of cleanliness	Faster start-up time
0.4 μm particle removal rating	Filter protects critical components such as regulators and MFCs	Lower cost of ownership
Low differential pressure	High flow rates with minimal flow restriction	Long service life

Need Help? Contact Us

* Required

Documents

Datasheets

Download: English

Description

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)


Feature	Benefit	Value
Welded to W-seal gasket	Filter can replace any W-seal gasket	Lower installation cost
Contains alignment retainer	Easy installation into system with minimal operator handling	Lower labor cost
All stainless steel construction	Broad compatibility with semiconductor process gases	Long service life
No housing required	No hold-up volume and zero gas displacement	Faster start-up time
Cleanroom packaged	High level of cleanliness	Faster start-up time
0.4 μm particle removal rating	Filter protects critical components such as regulators and MFCs	Lower cost of ownership
Low differential pressure	High flow rates with minimal flow restriction	Long service life

Specifications

Wetted Materials

Medium: 316L stainless steel (filter and gasket)

Removal Rating¹

≥ 0.4 μm at 99.9% efficiency

Operating Conditions

Maximum operating temperature Inert gases: 300 ˚C / 572 ˚F Anhydrous corrosive gases: 30 ˚C / 86 ˚F
Maximum differential pressure Inside out: 0.7 MPa at 38 ˚C / 100 psid at 100 ˚F Outside in: 1.4 MPa at 38 ˚C / 200 psid at 100 ˚F