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Download:Description
The Mini Ultramet-L®1100 Series assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases, and is ideally suited for point-of-use applications. The 1100 Series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel.
- One circumferential weld in entire product
- State-of-the-art 316L stainless steel or nickel medium
- Excellent particle removal efficiency vs. pressure drop
- Accommodates extremely high flow rates for the assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- Compact size
- 100% helium leak tested
- Cleanroom manufactured and packaged
Specifications
Materials
- Electropolished 316L stainless steel housing
- Housing material meets or exceeds VIM/VAR specifications
- EU Pressure Equipment Directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
- ≤ 0.13 μm / 5 μin Ra internal surface finish
- Cr:Fe (1:1) chromium-enriched internal housing surface chemistry
- 316L stainless steel or nickel filter medium
Removal Rating
- ≥ 3 nm
Preconditioned Options
1102 Series
- < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD.)
- < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD.)
- < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD.)
- No particle contribution above background ≤ 1 particle / m3 or ft3
Connections
- 1⁄4 in. gasket seal (VCR1 or compatible)
- 1⁄4 in. butt weld (0.89 mm / 0.035 in. wall)
Operating Conditions
- Maximum operating pressure:
- 20.7 MPa @ 38 °C / 3,000 psig @ 100 °F
- 11.6 MPa @ 450 °C / 1,685 psig @ 840 °F
- Maximum allowable differential pressure:
316L stainless steel filter:- 0.86 MPa @ 38 °C / 125 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F
- 0.69 MPa @ 38 °C / 100 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F
Particle Removal Characteristics
- 109 particle reduction up to 15 slpm
Leak Rating
- 100% helium leak tested to 10-9 atm•cm3/s
- Design validated to 10-11 atm•cm3/s
1VCR is a trademark of Swagelok Company.
Performance
Pressure Drop vs. Gas Flow Rate
316L Stainless Steel Filter Assembly
Nickel Filter Assembly
Type
Assemblies
Use
Filtration
Additional Information
Dimensions
Ordering Information
| Part Number | Description | Fitting Type | Preconditioned | |
| GLFF1100VMM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | No |
| GLFF1100VFM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) female inlet / male outlet | 88 / 3.47 | No |
| GLFF1100BW4 | All 316L stainless steel | 1⁄4 in. butt weld, 0.89 mm / 0.035 in wall | 42.5 / 1.75 | No |
| GLFF1102VMM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | Yes |
| GLFN1100VMM4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | No |
| GLFN1100VMF4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male inlet / female outlet | 71.1 / 2.80 | No |
| GLFN1100BW4 | Nickel media, 316L stainless steel housing | 1⁄4 in. butt weld, 0.89 mm / 0.035 in. wall | 42.5 / 1.75 | No |
| GLFN1102VMM4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | Yes |
Unit conversion: 100 kilopascals = 1 bar
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