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Micro Kleen-Change® Filter Assembly (Gas Filtration) product photo Primary L

Micro Kleen-Change® Filter Assembly (Gas Filtration)

The Micro Kleen-Change® gas Filter Assembly is designed for low pressure ultra high purity, point-of-use gas applications. The all fluoro-polymer assembly eliminates metal components and elastomer seals by welding an all fluoro-polymer element into an all PFA housing.
  • All fluoro-polymer element
  • No elastomeric seals
  • Wide range of chemical compatibility
  • Ideally suited for use in corrosive environments/locations
  • Eliminates metal components
  • Cleanroom manufactured and packaged
  • 100% integrity tested

Recommended Applications

  • Low pressure nitrogen
  • Lithography track tools
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Description

The Micro Kleen-Change® gas Filter Assembly is designed for low pressure ultra high purity, point-of-use gas applications. The all fluoro-polymer assembly eliminates metal components and elastomer seals by welding an all fluoro-polymer element into an all PFA housing.
  • All fluoro-polymer element
  • No elastomeric seals
  • Wide range of chemical compatibility
  • Ideally suited for use in corrosive environments/locations
  • Eliminates metal components
  • Cleanroom manufactured and packaged
  • 100% integrity tested

Recommended Applications

  • Low pressure nitrogen
  • Lithography track tools

Specifications

Materials

  • Media: PTFE
  • Shell, core, and end caps: PFA440HP

Removal Ratings

  • ≥ 0.003 μm

Filter Area

  • 13.5 cm2 / 2.1 in2

Connections: Inlet/Outlet

  • 1⁄8 in. Swagelok,1 Male/Male

Operating Conditions

  • Maximum operating pressure: 58 psi @ 77 °F / 4 bar @ 25 °C

Packaging

  • Double bagged
  • N2 purged
1 Swagelok is a registered trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Type

Filter Capsules

Ordering Information

Part Number Description Length (L) (in. / mm)
GDF3101SW2 1⁄8 in. Swagelok fitting, Male inlet/outlet 2.9 / 73

Unit conversion: 1 bar = 100 kilopascals

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