Gaskleen® V Series Filter Assembly product photo Primary L

Gaskleen® V Series Filter Assembly

The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.
  • 316L stainless steel housing
  • All-fluoro-polymer filter element
  • High temperature and pressure resistance
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.


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Description

The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.
  • 316L stainless steel housing
  • All-fluoro-polymer filter element
  • High temperature and pressure resistance
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.

Specifications

Materials of Construction

Filter Medium PTFE
Support Fluoropolymer
Core and End caps PFA
Internal Surface Finish ≤ 0.18 μm / 7 μin Ra
≤ 0.51 μm / 20 μin Ra
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM/VAR specifications.
EU pressure equipment directive:
Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
Internal Housing Surface Chemistry Cr:Fe (≥1.2:1) chromium-enriched
Removal Rating1 ≥ 3 nm
Preconditioned Cleanliness Option < 10 ppb moisture contribution
< 10 ppb total hydrocarbon (THC) contribution
< 10 ppb oxygen (O2) contribution
Connections 1⁄4 in, 1⁄2 in or 3/4 in Gasket Seal (VCR2 or compatible)
1⁄4 in 3/8 in or 1⁄2 compression fitting
Leak Rating 100% helium leak tested to 10-9 atm cm3/sec
Design validated to 10-11 atm cm3/sec
Design Pressure (Maximum Operating Pressure) 5.2 MPa @ 140 ºC / 750 psig @ 284 ºF
Maximum Allowable Differential Pressure 0.7 MPa @ 20 ºC / 100 psid @ 68 ºF
Maximum Allowable Reverse Differential Pressure 0.34 MPa @ 20 ºC / 50 psid @ 68 ºF

1 Particle rating based on laboratory testing with NaCl aerosol.
2 VCR is a trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

VMM4

Type

Filter Capsules

Additional Information

Dimensions

Dimensions
Unit conversion: 100 kilopascals = 1 bar

Ordering Information

Part Number3 Description Nominal Length
(L) (mm / inch)
Preconditioned
SGLFPF6501VMM4 14 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 No
SGLFPF6502VMM4 14 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 Yes
SGLFPF6501VMM8 12 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 No
SGLFPF6502VMM8 12 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 Yes
SGLFPF6501VMM12 34 in. Gasket seal, (VCR or compatible) male / male 140 / 5.5 No
GLFPF6501VMF4 14 in. Gasket seal, (VCR or compatible) male / female 141 / 5.6 No
SGLFPF6501SM4 14 in. Compression seal, (Swagelok4 or compatible) male / male 113 / 4.4 No
GLFPF6501SM4 14 in. Compression seal, (Swagelok or compatible) male / male 141 / 5.6 No
SGLFPF6501SM6 38 in. Compression seal, (Swagelok or ccompatible) male / male 118 / 4.6 No
GLFPF6501SM6 38 in. Compression seal, (Swagelok or compatible) male / male 148 / 5.8 No
SGLFPF6501SM8 12 in. Compression seal, (Swagelok or compatible) male / male 119 / 4.7 No
3 To order in box quantities of 24, please add “SB24” at the end of the part number. Example: SGLFPF6502VMM4SB24
4 Swagelok is a trademark of Swagelok Co.